A Novel Flexure Deflection Device with Damping Function: Towards Laser Reflector of 3D Lithography

  • Guixin Zhang
  • Hui TangEmail author
  • Xun ChenEmail author
  • Xiaohui Guo
  • Jiedong Li
  • Haoyu Pan
  • Shuo Li
Conference paper
Part of the Lecture Notes in Computer Science book series (LNCS, volume 11740)


3D lithography processing technology is widely used in micro-material processing, biological medicine and semiconductor industry because of its fast processing speed and high precision. However, the difficulty of this technology lies in overcoming the inertial vibration of laser and realizing the control of nanosecond time and nanospace. In order to solve the problem, this paper innovatively designs a laser reflection deflection mechanism with vibration reduction function. Compared with the traditional deflection device, the displacement amplifier is designed by combining with the flexible amplification mechanism, which increases the damping coefficient of the device and dissipates the vibration energy rapidly in the flexible mechanism to achieve the purpose of vibration reduction. Then we theoretically derive the energy reduced by each vibration from the theory of mechanical vibration. Finally, the frequency domain and time domain analysis of the deflection device proves that the deflection device can reduce the inertia amplitude by 31% without the control system.


3D lithography Deflection device Flexible Vibration reduction 



This work is supported in part by Natural Science Foundation of China (51605102, 51675106, U1601202), Guangdong Programs for Science and Technology (2016A030308016, 2015A030312008, 201804020040).


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© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.State Key Laboratory of Precision Electronic Manufacturing Technology and EquipmentGuangdong University of TechnologyGuangzhouChina

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