Adaptive Threshold Processing of Secondary Electron Images in Scanning Electron Microscope

  • Weiguo Bian
  • Mingyu Wang
  • Zhan YangEmail author
Conference paper
Part of the Lecture Notes in Computer Science book series (LNCS, volume 11740)


Observing the sample under a scanning electron microscope (SEM) requires adjustment of brightness and contrast to obtain a clear image. The traditional method is manually adjusted by the operator, which inevitably has errors. In this paper, an adaptive threshold processing method based on image-based normalized gray histogram is proposed. This method can acquire the threshold of the image according to the state of the currently obtained secondary electron images. When the brightness and contrast of the image change, the threshold can also be changed accordingly. It is concluded from a large number of tests that when the secondary electron image gray histogram has obvious double peaks and is located in the trough, the threshold obtained is optimal. Therefore, it is possible to better observe the pictures under the SEM.


SEM Secondary electron images Adaptive threshold Gray histogram Binarization 



This work is supported by National Key R&D Program of China (2018YFB1304901).


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© Springer Nature Switzerland AG 2019

Authors and Affiliations

  1. 1.School of Mechanical and Electric EngineeringSoochow UniversitySuzhouChina

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