Numerical Methods for Field Analysis of MEMS
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The finite element method has, in recent decades, become by far the most popular technique in computational electromagnetism. Many general purpose computer codes have been developed which provide toolboxes for computer-aided-design (CAD) of devices and systems. The technique is not suitable for hand calculations, and the algorithm is somewhat complicated; nevertheless, the formulation of the simplest two-dimensional case shall be followed to demonstrate the principle and to clarify some aspects of the applications.
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