Numerical Methods for Field Analysis of MEMS

  • Paolo Di BarbaEmail author
  • Slawomir Wiak
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 573)


The finite element method has, in recent decades, become by far the most popular technique in computational electromagnetism. Many general purpose computer codes have been developed which provide toolboxes for computer-aided-design (CAD) of devices and systems. The technique is not suitable for hand calculations, and the algorithm is somewhat complicated; nevertheless, the formulation of the simplest two-dimensional case shall be followed to demonstrate the principle and to clarify some aspects of the applications.


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© Springer Nature Switzerland AG 2020

Authors and Affiliations

  1. 1.Department of Electrical, Computer and Biomedical EngineeringUniversity of PaviaPaviaItaly
  2. 2.Institute of Mechatronis and Information SystemsLodzPoland

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