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Device Miniaturization Principles

  • Paolo Di BarbaEmail author
  • Slawomir Wiak
Chapter
  • 322 Downloads
Part of the Lecture Notes in Electrical Engineering book series (LNEE, volume 573)

Abstract

If the size of a mechanical device is reduced by a factor 10, its mass—and, consequently, inertial and gravitational forces—decrease by a factor 103; on the other side, forces depending on the device surface like the electrostatic interaction due to surface charge density, decrease by a factor 102. Therefore, the ratio of the electrostatic forces to the inertial ones increase by a factor 10; this remark stands as one of the main reasons behind the exploitation of electric field for generating motion in a device exhibiting sub-millimetric size.

References

  1. 1.
    Di Barba P, Savini A, Wiak S (2008) Field models in electricity and magnetism. Springer, Berlin, GermanyCrossRefGoogle Scholar
  2. 2.
    Jones TB, Nenadic NG (2013) Electromechanics and MEMS. Cambridge University Press, CambridgeGoogle Scholar

Copyright information

© Springer Nature Switzerland AG 2020

Authors and Affiliations

  1. 1.Department of Electrical, Computer and Biomedical EngineeringUniversity of PaviaPaviaItaly
  2. 2.Institute of Mechatronis and Information SystemsLodzPoland

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