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Miniaturized Photoacoustic Gas Sensor for CO2

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Sensor Systems Simulations

Abstract

Gas sensing is one of the key topics in the area of environmental sensing. Besides the automotive sector, consumer markets with air quality applications also require a huge number of cheap devices. In this chapter, a new sensor system is described, based on the photoacoustic effect and realized in a ceramic package. The new sensor systems perfectly suit the requirements of a modern and state of the art gas sensor for the high-volume market.

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References

  1. T.H. Tille, Automobil-Sensorik: Ausgewählte Sensorprinzipien und deren automobile Anwendung. 1. Auflage (Springer, Berlin, 2016). ISBN 978-3-6624-8943-7

    Book  Google Scholar 

  2. Department of Defense, MIL-STD-883K: Test Method Standard Microcircuits (Department of Defense, Columbo, OH, 2016)

    Google Scholar 

  3. National Semiconductor Corporation, Semiconductor Packaging Assembly Technology (National Semiconductor, Santa Clara, CA, 1999). www.national.com

    Google Scholar 

  4. D. Stroehle, On the penetration of gases and water vapour into packages with cavities and on maximum allowable leak rates, in 15th International Reliability Physics Symposium, Las Vegas (Nevada), (1977), pp. 101–106. https://doi.org/10.1109/IRPS.1977.362778

    Chapter  Google Scholar 

  5. S. Costello, M.P.Y. Desmulliez, Hermeticity testing of MEMS microelectronic packages, 1st edn. (Artech House, Norwood, 2013). ISBN 978-1-6080-7527-0

    Google Scholar 

  6. S. Costello, M.P.Y. Desmulliez, S. Mccracken, Review of test methods used for the measurement of hermeticity in packages containing small cavities, in IEEE Transactions on Components, Packaging and Manufacturing Technology, ed. by S. Costello et al., vol. 2, (2012), pp. 430–438. https://doi.org/10.1109/TCPMT.2011.2176122

    Chapter  Google Scholar 

  7. H. Greenhouse, Hermeticity of Electronic Packages, 2nd edn. (Elsevier, Amsterdam, 2011). ISBN 978-1-4377-7877-9

    Google Scholar 

  8. “HITRAN spectral database,” 2016 [online] https://www.cfa.harvard.edu/hitran/

  9. S.A. Abdul-Wahab, S.C.F. En, A. Elkamel, L. Ahmadi, K. Yetilmezsoy, A review of standards and guidelines set by international bodies for the parameters of indoor air quality. Atmos. Pollut. Res. 5, 751–767 (2015)

    Article  Google Scholar 

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Correspondence to Horst Theuss .

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Theuss, H., Kolb, S., Eberl, M., Schaller, R. (2020). Miniaturized Photoacoustic Gas Sensor for CO2. In: van Driel, W., Pyper, O., Schumann, C. (eds) Sensor Systems Simulations. Springer, Cham. https://doi.org/10.1007/978-3-030-16577-2_3

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  • DOI: https://doi.org/10.1007/978-3-030-16577-2_3

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  • Publisher Name: Springer, Cham

  • Print ISBN: 978-3-030-16576-5

  • Online ISBN: 978-3-030-16577-2

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