Abstract
Chapter 1 reviews the recent progress in kinetic MEMS/NEMS-enabled energy harvesters as self-powered sensors. Recent advances and challenges in MEMS/NEMS-enabled self-sustained sensor working mechanisms including electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive are reviewed and discussed. Recent advances in Internet of Things (IoT) and sensor networks reveal new insight into the understanding of traditional power sources with the new characteristics of mobility, sustainability, and availability. Individually, the power consumption of each sensor unit is low; however, the number of units deployed is huge. As predicted by Cisco, trillions of sensors will be distributed on the earth by 2020. Conventional technologies which employ batteries to supply power may not be the choice. Energy harvesting systems as self-sustained power sources are capable of capturing and transforming unused ambient energy into the electrical energy. Intensive efforts during the last two decades toward the development of micro-/nanoelectromechanical systems (MEMS/NEMS)-enabled energy harvesting technologies have yield breakthroughs in self-powered sensor evolutions.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsReferences
Sauerbrey, J., Schmitt-Landsiedel, D., & Thewes, R. (2003). A 0.5-V 1-/spl mu/W successive approximation ADC. IEEE Journal of Solid-State Circuits, 38(7), 1261–1265.
Steingart, D. (2009). Power sources for wireless sensor networks. In S. Priya & D. Inman (Eds.), Energy harvesting technologies (pp. 267–286). New York: Springer.
Knight, C., Davidson, J., & Behrens, S. (2008). Energy options for wireless sensor nodes. Sensors, 8(12), 8037–8066.
Paradiso, J. A., & Starner, T. (2005). Energy scavenging for mobile and wireless electronics. IEEE Pervasive Computing, 4(1), 18–27.
Xie, J., Chengkuo, L., & Hanhua, F. (2010). Design, fabrication, and characterization of CMOS MEMS-based thermoelectric power generators. Journal of Microelectromechanical Systems, 19(2), 317–324.
Roundy, S., Wright, P. K., & Rabaey, J. (2003). A study of low level vibrations as a power source for wireless sensor nodes. Computer Communications, 26(11), 1131–1144.
Hudak, N. S., & Amatucci, G. G. (2008). Small-scale energy harvesting through thermoelectric, vibration, and radiofrequency power conversion. Journal of Applied Physics, 103, 101301.
Zhou, S. X., & Zuo, L. (2018). Nonlinear dynamic analysis of asymmetric tristable energy harvesters for enhanced energy harvesting. Communications in Nonlinear Science and Numerical Simulation, 61, 271–284.
Chen, G. J., Li, Y. F., Xiao, H. M., & Zhu, X. (2017). A micro-oscillation-driven energy harvester based on a flexible bipolar electret membrane with high output power. Journal of Materials Chemistry A, 5, 4150–4155.
Halim, M. A., et al. (2018). An electromagnetic rotational energy harvester using sprung eccentric rotor, driven by pseudo-walking motion. Applied Energy, 217, 66–74.
Zhang, X., et al. (2018). Broad bandwidth vibration energy harvester based on thermally stable wavy fluorinated ethylene propylene electret films with negative charges. Journal of Micromechanics and Microengineering, 28, 065012.
Wang, Z. L. (2013). Triboelectric nanogenerators as new energy technology for self-powered systems and as active mechanical and chemical sensors. ACS Nano, 7(11), 9533–9557.
Roundy, S., Wright, P. K., & Pister, K. S. (2002). Micro-electrostatic vibration-to-electricity converters. Fuel Cells (methanol), 220(22), 1–10.
Sakane, Y., Suzuki, Y., & Kasagi, N. (Oct 2008). The development of a high-performance perfluorinated polymer electret and its application to micro power generation. Journal of Micromechanics and Microengineering, 18(10), 104011.
Boisseau, S., Duret, A.-B., Chaillout, J.-J., & Despesse, G. (2012). New DRIE-patterned electrets for vibration energy harvesting. In EPJ Web of Conferences (Vol. 33, p. 02010). EDP Sciences. Les Ulis, France.
Tao, K., Liu, S., Lye, S. W., Miao, J., & Hu, X. (2014). A three-dimensional electret-based micro power generator for low-level ambient vibrational energy harvesting. Journal of Micromechanics and Microengineering, 24(6), 065022.
Tao, K., Miao, J., Lye, S. W., & Hu, X. (2015). Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting. Sensors and Actuators A: Physical, 228, 95–103.
Tao, K., Lye, S. W., Miao, J., Tang, L., & Hu, X. (2015). Out-of-plane electret-based MEMS energy harvester with the combined nonlinear effect from electrostatic force and a mechanical elastic stopper. Journal of Micromechanics and Microengineering, 25(10), 104014.
Tao, K., Lye, S. W., Miao, J., & Hu, X. (2015). Design and implementation of an out-of-plane electrostatic vibration energy harvester with dual-charged electret plates. Microelectronic Engineering, 135(0), 32–37.
Tao, K., Wu, J., Tang, L., Hu, L., Lye, S. W., & Miao, J. (2017). Enhanced electrostatic vibrational energy harvesting using integrated opposite-charged electrets. Journal of Micromechanics and Microengineering, 27(4), 044002.
Tao, K., Tang, L. H., Wu, J., Lye, S. W., Chang, H. L., & Miao, J. M. (2018). Investigation of multimodal electret-based MEMS energy harvester with impact-induced nonlinearity. Journal of Microelectromechanical Systems, 27(2), 276–288.
Williams, C. B., & Yates, R. B. (Mar-Apr 1996). Analysis of a micro-electric generator for microsystems. Sensors and Actuators a-Physical, 52(1–3), 8–11.
Tao, K., Ding, G., Wang, P., Yang, Z., & Wang, Y. (2012). Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnets. Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 2012, pp. 1237–1240.
Tao, K., Wu, J., Kottapalli, A. G. P., et al. (2017). Micro-patterning of resin-bonded NdFeB magnet for a fully integrated electromagnetic actuator. Solid-State Electronics, 138, 66–72.
Tao, K., Wu, J., Tang, L., et al. (2016). A novel two-degree-of-freedom MEMS electromagnetic vibration energy harvester. Journal of Micromechanics and Microengineering, 26(3), 035020.
Davino, D. Kinetic energy harvesting by magnetostrictive materials. Available: http://www.sigmaaldrich.com/technical-documents/articles/materials-science/kinetic-energy-harvesting.html
Ueno, T. (2015). Performance of improved magnetostrictive vibrational power generator, simple and high power output for practical applications. Journal of Applied Physics, 117, 17A740.
Lee, B., Lin, S., Wu, W., Wang, X., Chang, P., & Lee, C. (2009). Piezoelectric MEMS generators fabricated with an aerosol deposition PZT thin film. Journal of Micromechanics and Microengineering, 19(6), 065014.
Wang, P. H., et al. (2018). Complementary electromagnetic-triboelectric active Sensor for detecting multiple mechanical triggering. Advanced Functional Materials, 1705808, 1–9.
Liu, H., Zhang, S., Kathiresan, R., Kobayashi, T., & Lee, C. (2012). Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability. Applied Physics Letters, 100(22), 223905–223903.
Xuefeng, H., Zhengguo, S., Yaoqing, C., & You, Z. (2013). A micromachined low-frequency piezoelectric harvester for vibration and wind energy scavenging. Journal of Micromechanics and Microengineering, 23(12), 125009.
Qi, Y., Kim, J., Nguyen, T. D., Lisko, B., Purohit, P. K., & McAlpine, M. C. (2011). Enhanced piezoelectricity and stretchability in energy harvesting devices fabricated from buckled PZT ribbons. Nano Letters, 11(3), 1331–1336.
Wang, Z. L., & Song, J. (2006). Piezoelectric nanogenerators based on zinc oxide nanowire arrays. Science, 312(5771), 242–246.
Xu, S., Lao, C., Weintraub, B., & Wang, Z. L. (2008). Density-controlled growth of aligned ZnO nanowire arrays by seedless chemical approach on smooth surfaces. Journal of Materials Research, 23(8), 2072–2077.
Hu, Y., Xu, C., Zhang, Y., Lin, L., Snyder, R. L., & Wang, Z. L. (2011). A nanogenerator for energy harvesting from a rotating tire and its application as a self-powered pressure/speed sensor. Advanced Materials, 23(35), 4068–4071.
Lee, M., Bae, J., Lee, J., Lee, C.-S., Hong, S., & Wang, Z. L. (2011). Self-powered environmental sensor system driven by nanogenerators. Energy & Environmental Science, 4(9), 3359–3363.
Chang, C., Tran, V. H., Wang, J., Fuh, Y.-K., & Lin, L. (2010). Direct-write piezoelectric polymeric nanogenerator with high energy conversion efficiency. Nano Letters, 10(2), 726–731.
Zhou, Y. S., et al. (2014). Nanometer resolution self-powered static and dynamic motion sensor based on micro-grated triboelectrification. Advanced Materials, 26(11), 1719–1724.
Lin, L., et al. (2013). Segmentally structured disk triboelectric nanogenerator for harvesting rotational mechanical energy. Nano Letters, 13(6), 2916–2923.
Lin, L., Wang, S., Niu, S., Liu, C., Xie, Y., & Wang, Z. L. (2014). Noncontact free-rotating disk triboelectric nanogenerator as a sustainable energy harvester and self-powered mechanical sensor. ACS Applied Materials & Interfaces, 6(4), 3031–3038.
Fan, F.-R., Lin, L., Zhu, G., Wu, W., Zhang, R., & Wang, Z. L. (2012). Transparent triboelectric nanogenerators and self-powered pressure sensors based on micropatterned plastic films. Nano Letters, 12(6), 3109–3114.
Lin, L., et al. (2013). Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging. ACS Nano, 7(9), 8266–8274.
Zhu, G., et al. (2014). Self-powered, ultrasensitive, flexible tactile sensors based on contact electrification. Nano Letters, 14(6), 3208–3213.
Yang, J., Chen, J., Liu, Y., Yang, W., Su, Y., & Wang, Z. L. (2014). Triboelectrification-based organic film nanogenerator for acoustic energy harvesting and self-powered active acoustic sensing. ACS Nano, 8(3), 2649–2657.
Yu, A., et al. (2015). Self-powered acoustic source locator in underwater environment based on organic film triboelectric nanogenerator. Nano Research, 8(3), 765–773.
Lin, Z. H., et al. (2013). A self-powered triboelectric nanosensor for mercury ion detection. Angewandte Chemie International Edition, 52(19), 5065–5069.
Li, Z., et al. (2015). β-cyclodextrin enhanced triboelectrification for self-powered phenol detection and electrochemical degradation. Energy & Environmental Science, 8(3), 887–896.
Acknowledgments
This research is supported by National Natural Science Foundation of China (Grant No. 51705429), the Fundamental Research Funds for the Central Universities, and the Key Laboratory fund of Science and Technology on Micro-system Laboratory (No. 614280401010417).
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
Copyright information
© 2019 The Author(s), under exclusive licence to Springer Nature Switzerland AG
About this chapter
Cite this chapter
Tao, K., Chang, H., Wu, J., Tang, L., Miao, J. (2019). MEMS/NEMS-Enabled Energy Harvesters as Self-Powered Sensors. In: Self-Powered and Soft Polymer MEMS/NEMS Devices. SpringerBriefs in Applied Sciences and Technology. Springer, Cham. https://doi.org/10.1007/978-3-030-05554-7_1
Download citation
DOI: https://doi.org/10.1007/978-3-030-05554-7_1
Published:
Publisher Name: Springer, Cham
Print ISBN: 978-3-030-05553-0
Online ISBN: 978-3-030-05554-7
eBook Packages: EngineeringEngineering (R0)