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Summary

  • Yu-Chuan Lin
Chapter
  • 330 Downloads
Part of the Springer Theses book series (Springer Theses)

Abstract

The work in this thesis was trying to probe the viability of producing high-quality and large-area 2D semiconductors, transition metal dichalcogenides in particular, by thin-film deposition. Many aspects, including the surface termination and crystal facets of substrates used for growth and the thin-film deposition conditions, are taken into account in order to achieve high-quality results. This integration engineering is carried out on two types of interfaces: 2D materials on 3D substrates (quasi-vdW epitaxy) and 2D materials on vdW substrates (regular vdW epitaxy).

Keywords

Thin Film Deposition Conditions Transition Metal Dichalcogenides Crystal Facets Resultant Surface Scanning Probe Microscopy Techniques 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Copyright information

© Springer Nature Switzerland AG 2018

Authors and Affiliations

  • Yu-Chuan Lin
    • 1
  1. 1.Center for Nanophase Materials SciencesOak Ridge National LaboratoryOak RidgeUSA

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