Abstract
A novel closed-loop regulation of a piezoelectric actuator is presented to implement wide-band and hysteresis-free motion required for high speed operation of scanning probe microscopy. Velocity of the actuator’s motion is detected via induced current, and converted to displacement by integration. By appropriately applying both velocity and displacement feedbacks, the fundamental resonance of the actuator was completely eliminated and other subresonances were significantly suppressed. A bandwidth of ca. 300 kHz for dynamic operation was achieved consequently. Actuator’s intrinsic hysteresis was also significantly suppressed.
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Sugawara, Y., Li, Y., Naitoh, Y., Kageshima, M. (2010). Development of High-Speed Actuator for Scanning Probe Microscopy. In: Higuchi, T., Suzumori, K., Tadokoro, S. (eds) Next-Generation Actuators Leading Breakthroughs. Springer, London. https://doi.org/10.1007/978-1-84882-991-6_5
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DOI: https://doi.org/10.1007/978-1-84882-991-6_5
Publisher Name: Springer, London
Print ISBN: 978-1-84882-990-9
Online ISBN: 978-1-84882-991-6
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