Abstract
This article deals with AZARASHI (Seal) mechanism. A device with three degrees of freedom (DOFs) consists of two controlled electromagnets connected by two piezoelectric actuators with an electromagnet that generates a constant friction. The friction at the controlled electromagnets is alternated. The whole device wriggles by deforming the piezoelectric actuators. A displacement control method of the piezoelectric actuator by driving with a series of current pulses is developed for the high resolution throughout the deformable range. In the feed-forward control, the hysteresis and nonlinearity in the drive by the current pulse were much smaller than those by a voltage linear amplifier. It was applied to the driving method of Extension device of a 1-DOF device with nanometeraccuracy. An application to a positioning stage of a manipulator is introduced.
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Furutani, K. (2010). AZARASHI (Seal) Mechanism for Meso/Micro/Nano Manipulators. In: Higuchi, T., Suzumori, K., Tadokoro, S. (eds) Next-Generation Actuators Leading Breakthroughs. Springer, London. https://doi.org/10.1007/978-1-84882-991-6_3
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DOI: https://doi.org/10.1007/978-1-84882-991-6_3
Publisher Name: Springer, London
Print ISBN: 978-1-84882-990-9
Online ISBN: 978-1-84882-991-6
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