Part of the Advances in Industrial Control book series (AIC)
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Precision control is one of the core requirements to be met by ultra precision machines. A well chosen control strategy will enable a comprehensive complete control and compensation of the mechanical system to achieve precise positioning. The field of high-precision motion control is now an interesting subject of research. Precision control technology will be discussed here with respect to the following broad fields:
KeywordsScan Tunneling Microscopy Excimer Laser Solder Bump Molten Solder Precision Control
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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© Springer-Verlag London Limited 2008