Micro-relay Reliability

  • Hei Kam
  • Fred Chen
Chapter
Part of the Microsystems and Nanosystems book series (MICRONANO, volume 1)

Abstract

In this chapter, we provide a general overview and initial measurement studies of various failure modes for micro-relays, including structural fatigue, dielectric charging, contact surface oxidation, and welding-induced failure. We then use these results to establish the micro-relay design guidelines for applications such as digital logic and CMOS power gates.

Keywords

Fatigue Welding Tungsten Expense Ruthenium 

References

  1. 1.
    J.W. McPherson, Reliability Physics and Engineering: Time-to-Failure Modeling (Springer, New York, NY, 2010)CrossRefGoogle Scholar
  2. 2.
    Y. Chen, R. Nathanael, J. Yaung, L. Hutin, T.-J. King Liu. Reliability of MEM relays for zero leakage logic, in SPIE, vol. 8614, Feb 2013, p. 3.Google Scholar
  3. 3.
    Y. Chen, R. Nathanael, J. Jeon, J. Yaung, L. Hutin, T.-J. King Liu, Characterization of contact resistance stability in MEM relays with tungsten electrodes. J. Microelectromech. Syst. 21(3), 511–513 (2012)CrossRefGoogle Scholar
  4. 4.
    I. Chen, Y. Chen, L. Hutin, V. Pott, R. Nathanael, T.-J. King Liu. Stable ruthenium-contact relay technology for low-power logic, in IEEE Solid-State Sensors, Actuators and Microsystems, 2013, pp. 896–899.Google Scholar
  5. 5.
    R. Holm, Electric Contact, 4th edn. (Springer, New York, NY, 1967)CrossRefGoogle Scholar
  6. 6.
    H. Kam, E. Alon, T.-J. King Liu. A predictive contact reliability model for MEM logic switches, in 2010 I.E. International Electron Devices Meeting (IEDM 2009), San Francisco, CA, December 2010, pp. 16.4.1–16.4.4.Google Scholar
  7. 7.
    H. Fariborzi, M. Spencer, V. Karkare, J. Jeon, R. Nathanael, C. Wang, F. Chen, H. Kam, V. Pott, T.-J. King Liu, E. Alon, V. Stojanovic, D. Markovic. Analysis and demonstration of MEM-relay power gating. IEEE Custom Integrated Circuits Conference, Sep 2010.Google Scholar

Copyright information

© Springer Science+Business Media New York 2015

Authors and Affiliations

  • Hei Kam
    • 1
  • Fred Chen
    • 2
  1. 1.Intel CorporationHillsboroUSA
  2. 2.Lion Semiconductor, Inc.BerkeleyUSA

Personalised recommendations