Skip to main content
SpringerLink
Log in
Book cover

Atom-Probe Tomography pp 1–49Cite as

Introduction to Atom-Probe Tomography

  • Chapter
  • First Online:

Abstract

This book describes both current atom-probe tomography (APT) practice and knowledge of related emission science. The atomic-level materials characterization technique of APT is currently the only technique able to detect individual atoms of all elements in a three-dimensional structure. Over the last decade, many major developments have raised APT to its present status as a routine characterization technique. This introductory chapter briefly describes the previous generations of atom probes and the technical developments that led to the modern state-of-the-art local electrode atom probe (LEAP®). The important ion emission process of field evaporation and the basics of field ion microscopy (FIM) are introduced. Some examples of APT characterization are also presented.

This is a preview of subscription content, log in via an institution.

Chapter
USD   29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   129.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

References

  1. M.K. Miller, G.D.W. Smith, Atom Probe Microanalysis: Principles and Applications to Materials Problems (Material Research Society, Pittsburgh, 1989)

    Google Scholar 

  2. T. Sakurai, A. Sakai, H.W. Pickering, Atom-Probe Field Ion Microscopy and Its Applications, Adv. Electron. Electron Phys., Suppl. 10 (Academic, Boston, 1989)

    Google Scholar 

  3. T.T. Tsong, Atom-Probe Field Ion Microscopy: Field Ion Emission, and Surfaces and Interfaces at Atomic Resolution (Cambridge University Press, Cambridge, 1990)

    Book  Google Scholar 

  4. M.K. Miller, A. Cerezo, M.G. Hetherington, G.D.W. Smith, Atom Probe Field Ion Microscopy (Clarendon, Oxford, 1996)

    Google Scholar 

  5. M.K. Miller, Atom Probe Tomography: Analysis at the Atomic Level (Kluwer Academic/Plenum, New York, 2000)

    Book  Google Scholar 

  6. B. Gault, M.P. Moody, J.M. Cairney, S.P. Ringer, Atom Probe Microscopy (Springer, New York, 2012)

    Book  Google Scholar 

  7. R. Gomer, Field Emission and Field Ionization (Mass, Harvard University Press, Cambridge, 1961)

    Google Scholar 

  8. J.J. Hren, S. Ranganathan (eds.), Field-Ion Microscopy (Plenum, New York, 1968)

    Google Scholar 

  9. E.W. Müller, T.T. Tsong, Field Ion Microscopy (Elsevier, New York, 1969)

    Google Scholar 

  10. K.M. Bowkett, D.A. Smith, Field-Ion Microscopy (North Holland, Amsterdam, 1970)

    Google Scholar 

  11. R. Wagner, Field Ion Microscopy (Springer, Berlin, 1982)

    Book  Google Scholar 

  12. P.C. Seynaeve, J.I. Broos, J. Belge Radiol. 78, 284 (1995)

    Google Scholar 

  13. A.J. Melmed, Biogr. Mem. 82, 198 (2003)

    Google Scholar 

  14. R. Gomer, M.G. Inghram, J. Am. Chem. Soc. 77, 500 (1955)

    Article  Google Scholar 

  15. H.D. Beckey, Field Ionization Mass Spectrometry (Pergamon, Oxford, 1971)

    Google Scholar 

  16. H.D. Beckey, Principles of Field Ionization and Field Desorption Mass Spectrometry (Pergamon, Oxford, 1977)

    Google Scholar 

  17. J.H. Block, D.L. Cocke, N. Kruse, Heterogeneous catalysis in high electric fields, in Handbook of Heterogeneous Catalysis, ed. by G. Ertl, H. Knözinger, J. Weitkamp (VCH, Weinheim, 1997), pp. 1104–1123

    Google Scholar 

  18. E.W. Müller, J.A. Panitz, S.B. McLane, Rev. Sci. Instrum. 39, 83 (1968)

    Article  Google Scholar 

  19. J.A. Panitz, Rev. Sci. Instrum. 44, 1034 (1973)

    Article  Google Scholar 

  20. T.F. Kelly, P.P. Camus, D.J. Larson, L.M. Holzman, S.S. Bajikar, Ultramicroscopy 62, 29 (1996)

    Article  Google Scholar 

  21. G.L. Kellogg, T.T. Tsong, J. Appl. Phys. 51, 1184 (1980)

    Article  Google Scholar 

  22. J.H. Winkler, Gedanken von den Eigenschaften, Wirkungen und Ursachen der Electricität nebst Beschreiburg zweir electrischer Maschinen (Verlag B. Ch. Breitkopf, Leipzig, 1744)

    Google Scholar 

  23. J.J. Thomson, Philos. Mag. 44, 293 (1897)

    Article  Google Scholar 

  24. J.E. Lilienfeld, Am. J. Roentgenol. 9, 172 (1922)

    Google Scholar 

  25. R.A. Millikan, C.C. Lauritsen, Proc. Natl. Acad. Sci. U.S.A. 14, 45 (1928)

    Article  Google Scholar 

  26. R.H. Fowler, L. Nordheim, Proc. R. Soc. Lond. A 119, 173 (1928)

    Article  Google Scholar 

  27. E.W. Müller, Z. Phys. 106, 541 (1937)

    Google Scholar 

  28. Y. Saito, K. Hata, T. Murata, Jpn. J. Appl. Phys. 39, L271 (2000)

    Article  Google Scholar 

  29. Y. Kishimoto, K. Hata, Surf. Interface Anal. 40, 1669 (2008)

    Article  Google Scholar 

  30. J.W. Gadzuk, E.W. Plummer, Rev. Mod. Phys. 45, 487 (1973)

    Article  Google Scholar 

  31. A. Modinos, Field, Thermionic and Secondary Electron Emission Spectroscopy (Plenum, New York, 1984)

    Book  Google Scholar 

  32. K.L. Jensen, Adv. Imaging Electron Phys. 149, 1 (2007)

    Article  Google Scholar 

  33. R.G. Forbes, The theory of bright field electron and ion emission sources, Chap. 1 in Nanofabrication Using Focused Ion and Electron Beams, ed. by I. Utke, S. Moshkalev, P. Russell (Oxford University Press, Oxford, 2012), p. 45

    Google Scholar 

  34. W. Zhu (ed.), Vacuum Microelectronics (Wiley, New York, 2001)

    Google Scholar 

  35. G. Fursey, Field Emission in Vacuum Microelectronics (Kluwer, New York, 2005)

    Google Scholar 

  36. J. Orloff (ed.), Handbook of Charged Particle Optics, 2nd edn. (CRC Press, Boca Raton, 2009)

    Google Scholar 

  37. L.W. Swanson, G.A. Schwind, Adv. Imaging Electron Phys. 159, 63 (2009)

    Article  Google Scholar 

  38. Y. Saito (ed.), Carbon Nanotube and Related Field Emission (Wiley-VCH, Weinheim, 2010)

    Google Scholar 

  39. K. Bahadur, Experimental Investigation of Field Ion Emission. Ph.D. thesis, Pennsylvania State University, 1955

    Google Scholar 

  40. E.W. Müller, K. Bahadur, Phys. Rev. 102, 624 (1956)

    Article  Google Scholar 

  41. A.J. Melmed, Appl. Surf. Sci. 94/95, 17 (1996)

    Article  Google Scholar 

  42. R.G. Forbes, Ph.D. thesis, Cambridge University, 1970

    Google Scholar 

  43. R.G. Forbes, Appl. Surf. Sci. 94/95, 1 (1996)

    Article  Google Scholar 

  44. J.A. Panitz, J. Vac. Sci. Technol. 12, 210 (1975)

    Article  Google Scholar 

  45. F. Vurpillot, A. Bostel, D. Blavette, J. Microsc. 196, 332 (1999)

    Article  Google Scholar 

  46. J. Gross, Mass Spectrometry, 2nd edn. (Springer, Berlin, 2011). Chap. 8

    Book  Google Scholar 

  47. M. Moors, T.V. de Bocarmé, N. Kruse, Catalysis Today, 124, 61 (2007)

    Google Scholar 

  48. R.G. Forbes, Surf. Sci. 61, 221 (1976)

    Article  Google Scholar 

  49. N. Ernst, Appl. Surf. Sci. 67, 82 (1993)

    Article  Google Scholar 

  50. N. Ernst, Surf. Sci. 87, 469 (1989)

    Article  Google Scholar 

  51. R.J. Walko, E.W. Müller, Phys. Stat. Sol. (a) 9, K9 (1972)

    Google Scholar 

  52. E.W. Müller, T.T. Tsong, Prog. Surf. Sci. 4, 1 (1973)

    Article  Google Scholar 

  53. A.R. Waugh, E.D. Boyes, M.J. Southon, Surf. Sci. 61, 109 (1976)

    Article  Google Scholar 

  54. J.A. Panitz, Prog. Surf. Sci. 8, 219 (1978)

    Article  Google Scholar 

  55. S.S. Brenner, J.T. McKinney, Surf. Sci. 23, 88 (1970)

    Article  Google Scholar 

  56. M.K. Miller, M.G. Hetherington, Surf. Sci. 246, 442 (1991)

    Article  Google Scholar 

  57. M.K. Miller, L. Longstreth-Spoor, K.F. Kelton, Ultramicroscopy 111, 469 (2011)

    Article  Google Scholar 

  58. E.W. Müller, T.T. Tsong, Field Ion Microscopy (Elsevier, New York, 1969), pp. 166–169

    Google Scholar 

  59. E.W. Müller, T.T. Tsong, Field Ion Microscopy (Elsevier, New York, 1969), pp. 155–156

    Google Scholar 

  60. M. Drechsler, P. Wolf, in 4th International Conference on Electron Microscopy, vol. 1, 1958 (Springer, Berlin, 1960), p. 835

    Google Scholar 

  61. A.J.W. Moore, J. Phys. Chem. Solids 23, 907 (1962)

    Article  Google Scholar 

  62. A.J.W. Moore, J.A. Spink, Surf. Sci. 12, 479 (1968)

    Google Scholar 

  63. A.J.W. Moore, in Field Ion Microscopy, ed. by J.J. Hren, S. Ranganathan (Plenum Press, New York, 1968), p. 69

    Google Scholar 

  64. M.K. Miller, A. Cerezo, M.G. Hetherington, G.D.W. Smith, Atom Probe Field Ion Microscopy (Clarendon, Oxford, 1996), pp. 187–188

    Google Scholar 

  65. R.C. Sanwald, J.J. Hren, Surf. Sci. 7, 197 (1967)

    Article  Google Scholar 

  66. A.J. Perry, D.G. Brandon, Philos. Mag. 16, 119 (1967)

    Article  Google Scholar 

  67. A.J. Perry, D.G. Brandon, Surf. Sci. 8, 442 (1967)

    Google Scholar 

  68. W.H. Miller, A Treatise on Crystallography (Deighton, Cambridge, 1839).

    Google Scholar 

  69. W.P. Poschenreider, Int. J. Mass Spectrom. Ion Phys. 9, 83 (1972)

    Google Scholar 

  70. M.K. Miller, P.A. Beaven, G.D.W. Smith, Surf. Interface Anal. 1, 149 (1979)

    Article  Google Scholar 

  71. T.M. Hall, A. Wagner, D.N. Seidman, J. Phys. E: Sci. Instrum. 10, 884 (1977)

    Article  Google Scholar 

  72. M.K. Miller, Surf. Sci. 266, 494 (1992)

    Article  Google Scholar 

  73. A. Cerezo, T.J. Godfrey, G.D.W. Smith, Rev. Sci. Instrum. 59, 862 (1988)

    Article  Google Scholar 

  74. B. Deconihout, A. Bostel, A. Menand, J.M. Sarrau, M. Bouet, S. Chambreland, D. Blavette, Appl. Surf. Sci. 67, 444 (1993)

    Article  Google Scholar 

  75. A. Cerezo, T.J. Godfrey, J.M. Hyde, S.J. Sijbrandij, G.D.W. Smith, Appl. Surf. Sci. 76/77, 374 (1994)

    Article  Google Scholar 

  76. A. Cerezo, T.J. Godfrey, S.J. Sijbrandij, G.D.W. Smith, P.J. Warren, Rev. Sci. Instrum. 69, 49 (1998)

    Article  Google Scholar 

  77. B. Deconihout, L. Renaud, G. Da Costa, M. Bouet, A. Bostel, D. Blavette, Ultramicroscopy 73, 253 (1998)

    Article  Google Scholar 

  78. T.F. Kelly, P.P. Camus, D.J. Larson, L.M. Holzman, S.S. Bajikar, U.S. Patent 08/272 204, 8 Aug 1995

    Google Scholar 

  79. Y. Ishikawa, T. Yoshimura, S. Ohkido, O. Nishikawa, Japanese Patent No. JP7043373, 14 Feb 1995

    Google Scholar 

  80. O. Nishikawa, M. Kimoto, Appl. Surf. Sci. 76/77, 424 (1994)

    Article  Google Scholar 

  81. O. Nishikawa, M. Kimoto, M. Iwatsuki, Y. Ishikawa, J. Vac. Sci. Technol. B 13, 599 (1995)

    Article  Google Scholar 

  82. T.F. Kelly, M.K. Miller, Rev. Sci. Instrum. 78, 031101 (2007)

    Article  Google Scholar 

  83. T.F. Kelly, D.J. Larson, K. Thompson, R.L. Alvis, J.H. Bunton, J.D. Olson, B.P. Gorman, Annu. Rev. Mater. Res. 37, 681 (2007)

    Article  Google Scholar 

  84. E.A. Marquis, M.K. Miller, D. Blavette, S.P. Ringer, C.K. Sudbrack, G.D.W. Smith, MRS Bull. 34, 725 (2009)

    Article  Google Scholar 

  85. D.N. Seidman, Annu. Rev. Mater. Res. 37, 127 (2007)

    Article  Google Scholar 

  86. T.F. Kelly, O. Nishikawa, J.A. Panitz, T.J. Prosa, MRS Bull. 34, 744 (2009)

    Google Scholar 

  87. M.K. Miller, R.G. Forbes, Mater. Charact. 60, 461 (2009)

    Article  Google Scholar 

  88. D.N. Seidman, K. Stiller, MRS Bull. 34, 717 (2009)

    Article  Google Scholar 

  89. L.M. Gordon, D. Joester, Nature 469, 194 (2011)

    Article  Google Scholar 

  90. K. Rajan, Comb. Chem. High Throughput Screen. 14, 198 (2011)

    Article  Google Scholar 

  91. T.F. Kelly, D.J. Larson, MRS Bull. 37, 150 (2012)

    Article  Google Scholar 

  92. M.K. Miller, T.F. Kelly, K. Rajan, S.P. Ringer, Mater. Today 15, 159 (2012)

    Article  Google Scholar 

  93. M.K. Miller, K.F. Russell, J. Nucl. Mater. 371, 145 (2007)

    Article  Google Scholar 

  94. E.A. Marquis, N.A. Yahya, D.J. Larson, M.K. Miller, R.I. Todd, Mater. Today 13, 34 (2010)

    Article  Google Scholar 

  95. K. Inoue, F. Yano, A. Nishida, H. Takamizawa, T. Tsunomura, Y. Nagai, M. Hasegawa, Ultramicroscopy 109, 1479 (2009)

    Article  Google Scholar 

  96. K. Inoue, A.K. Kambham, D. Mangelinck, D. Lawerence, D.J. Larson, Micros. Today 20(5), 38 (2012)

    Article  Google Scholar 

  97. K. Thompson, P.L. Flaitz, P. Ronsheim, D.J. Larson, T.F. Kelly, Science 317, 1370 (2007)

    Article  Google Scholar 

  98. P.D. Edmondson, C.M. Parish, Y. Zhang, A. Hallén, M.K. Miller, Scr. Mater. 65, 731 (2011)

    Article  Google Scholar 

  99. Q. Li, C.M. Parish, K.A. Powers, M.K. Miller, J. Nucl. Mater. 445, 165 (2014)

    Article  Google Scholar 

  100. L. Yao, S.P. Ringer, J.M. Cairney, M.K. Miller, Scr. Mater. 69, 622 (2013)

    Article  Google Scholar 

  101. M.K. Miller, L. Yao, Curr. Opin. Solid State Mater. Sci. 17, 203 (2013)

    Article  Google Scholar 

  102. L. Yao, M.K. Miller, MRS Proc., 1645, Jan. 2014, mrsf13-1645-ee07-09; DOI: http://dx.doi.org/10.1557/opl.2014.90

Download references

Author information

Authors and Affiliations

  1. Oak Ridge National Laboratory, Oak Ridge, TN, USA

    Michael K. Miller

  2. Department of Electronic Engineering, University of Surrey, Guildford, Surrey, UK

    Richard G. Forbes

Authors
  1. Michael K. Miller
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Richard G. Forbes
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

Copyright information

© 2014 Springer Science+Business Media New York

About this chapter

Cite this chapter

Miller, M.K., Forbes, R.G. (2014). Introduction to Atom-Probe Tomography. In: Atom-Probe Tomography. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-7430-3_1

Download citation

Publish with us

Policies and ethics

Search

Navigation