Integrated Circuit Fabrication Processes

Abstract

Studying this chapter should enable you

• □ To understand which aspects of integrated circuit fabrication have an impact on design.

• □ To understand the basic processes of doping, oxide masking, photolithography, and metallization used in all silicon device fabrication, and the additions required for many IC fabrication processes.

• □ To learn how the individual fabrication stages are used to build up a complete CMOS circuit.

• □ To appreciate the requirements for photolithographic masks for ICs.

• □ To learn about yield, the cost of producing chips, and the effects of chip area on the cost.