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Optical Particle Counter Performance Definitions Effects on Submicrometer Particle Measurement

  • A. Lieberman

Abstract

Measurement of submicrometer particles, particularly in microelectronic process fluids, requires detection of sparse numbers of particles at the maximum sensitivity of a measurement device. Frequently, these measurements must be carried out in aggressive liquids. Under these conditions, the counting and sizing accuracy of the measurement device is strongly affected by some device performance parameters which are sometimes poorly defined. These include the particle properties observed by the device, its particle sizing resolution, counting accuracy at the point of maximum sensitivity, and its sizing accuracy. The effects of changes in these parameters on reported particle size and concentration data are discussed, along with their effects on inter- and intra-device correlations. Emphasis is placed on operation of optical particle counting systems.

Keywords

Particle Population Particle Size Distribution Function Submicrometer Particle Optical Particle Counter Particle Spatial Distribution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    SEMI Document No. 1831, “Particle Specification for Grade 10/0.1 Nitrogen and Argon Delivered as Pipeline Gas”, 1989, Semiconductor Equipment and Materials International, 805 E. Middlefield Rd., Mountain View, CA 94043.Google Scholar
  2. 2.
    J. R. Hodkinson, and J. R. Greenfield, Appl. Optics, 4, 1463–1474 (1965).CrossRefGoogle Scholar
  3. 3.
    J. Gebhart, P. Blankenburg, and C. Roth, in “Aerosols, Science, Technology and Industrial Applications of Airborne Particles”, B. Y. H. Liu, D. Y. H. Pui and H. J. Fissan, Editors, pp. 7–10, Elsevier Science Publishing Co., New York, NY, 1984.Google Scholar
  4. 4.
    A. Lieberman, in “Semiconductor Fabrication, Technology and Metrology”, D. C. Gupta, Editor, ASTM STP 990, American Society for Testing and Materials, Philadelphia, PA, 1989.Google Scholar
  5. 5.
    K. T. Whitby, R. B. Husar and B. Y. H. Liu, in “Aerosols and Atmospheric Chemistry”, G. M. Hidy, Editor, Academic Press, New York, 1972.Google Scholar
  6. 6.
    ASTM F658-87, “Standard Practice for Defining Size Calibration, Resolution, and Counting Accuracy of a Liquid-Borne Particle Counter using Spherical Particulate Material”, Amer. Society for Testing and Materials, Philadelphia, PA 19103.Google Scholar
  7. 7.
    S. P. Belyaev, and L. M. Levin, J. Aerosol Sci., 5, 325 (1974).CrossRefGoogle Scholar
  8. 8.
    R. Jaenicke, Aerosol Sci., 30, 95–111 (1972).CrossRefGoogle Scholar
  9. 9.
    N. K. Nikiforova, and Y. S. Sedunov, Aerosol Science, 10, 441–453 (1972).CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • A. Lieberman
    • 1
  1. 1.Particle Measuring Systems, Inc.FremontUSA

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