Optical Particle Counter Performance Definitions Effects on Submicrometer Particle Measurement
Measurement of submicrometer particles, particularly in microelectronic process fluids, requires detection of sparse numbers of particles at the maximum sensitivity of a measurement device. Frequently, these measurements must be carried out in aggressive liquids. Under these conditions, the counting and sizing accuracy of the measurement device is strongly affected by some device performance parameters which are sometimes poorly defined. These include the particle properties observed by the device, its particle sizing resolution, counting accuracy at the point of maximum sensitivity, and its sizing accuracy. The effects of changes in these parameters on reported particle size and concentration data are discussed, along with their effects on inter- and intra-device correlations. Emphasis is placed on operation of optical particle counting systems.
KeywordsParticle Population Particle Size Distribution Function Submicrometer Particle Optical Particle Counter Particle Spatial Distribution
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