Abstract
Application-specific particle atlases can be assembled and successfully applied to solve manufacturing contamination problems. The Intel Particle Atlas is used at Intel as a general materials reference for identification and elimination of contaminant particles in liquids and gases and on semiconductor wafer surfaces.
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References
C.M. Osburn, R.P. Donovan, H. Berger, and G.W. Jones, J. Environmental Sci., 45–57, (March/April 1988).
W.C. McCrone, editor, “The Particle Atlas”, Ann Arbor Science Publishers, Ann Arbor, MI, 1973.
Q.T. Phillips, W.D. Auser, J.M. Baldwin, and G.J. Washington, in “Proceedings of the 7th International Symposium on Containation Control” held in Paris, 1984.
R.W. Thomas, D.W. Calabrese, in “Proceedings of the IEEE Reliability Physics Meeting” held in Orlando, FL, 1985.
R.K. Lowry, J.H. Linn, G.M. Grove, and C.A. Vicroy, Semiconductor International, 73–77, (July 1987).
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© 1990 Springer Science+Business Media New York
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Greb, R., Mckeag, M. (1990). Building and Using an Application-Specific Particle Atlas. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_7
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DOI: https://doi.org/10.1007/978-1-4899-3544-1_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4899-3546-5
Online ISBN: 978-1-4899-3544-1
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