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Packaging High Purity Chemicals to Ensure Low Particulate Contamination at Point-of-Use

  • Thomas B. Hackett
  • Stephen S. Hupp

Abstract

Particulate control in high purity electronic chemicals requires that, in every step from chemical manufacture to use, a concerted effort be made to minimize contamination. In the packaging step, particulate contamination can arise from process piping and exposure to the atmosphere. Our data show that the first containers filled in each new lot of chemical contain contaminants from the process piping. Recirculation through filters can be used to reduce these particles. A clean room environment reduces introduction of airborne particulates into the products, but requires rigorous adherence to proper procedures.

Keywords

Clean Room Wafer Fabrication Contamination Control Particulate Contamination High Purity Chemical 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • Thomas B. Hackett
    • 1
  • Stephen S. Hupp
    • 1
  1. 1.Ashland Chemical CompanyDublinUSA

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