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Protected Particle Collection from Gas Streams for Characterization by Analytical Electron Microscopy

  • M. R. Anewalt
  • P. S. Schabes-Retchkiman
  • C. E. Lyman

Abstract

Submicron particles are known to cause yield losses in the manufacture of electronic devices. Analytical electron microscopy (AEM) is a powerful tool for characterizing particles by size, morphology and composition. Data obtained can be used to identify particle sources. Major problems include particle collection and contamination control during sampling and transfer into the AEM. A controlled atmosphere specimen holder was used to collect particles from a gas stream, to isolate them from ambient contamination and to transfer them into the specimen chamber of the AEM. The collecting grid was examined in the AEM before particle collection to verify its cleanliness and provide background data. The grid retracts into an isolation chamber inside the specimen holder, thus protecting it from extraneous contamination during transfer to the AEM from the sampling site. The AEM combines a number of techniques to characterize particles by size, morphology, composition and crystal structure. Elemental analysis of individual particles and elemental images of high resolution are obtained by X-ray Emission Spectroscopy using the characteristic x-rays to identify specific elements. Examination of a large number of particles provides a histogram of the types of particles present.

Keywords

Molybdenum Disulfide Analytical Electron Microscopy Scanning Transmission Electron Microscope Bright Field Image Submicron Particle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    D. C. Joy, A. D. Romig, and J. I. Goldstein, “Principles of Analytical Electron Microscopy,” Plenum Press, New York, 1986.CrossRefGoogle Scholar
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    D. B. Williams, “Practical Analytical Electron Microscopy in Materials Science,” Philips Electron Optics Publishing Group, Mahway, NJ, 1984.Google Scholar
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    C. E. Lyman, H. G. Stenger, Jr., and J. R. Michael, Ultramicroscopy, 22, 129 (1987).CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • M. R. Anewalt
    • 1
  • P. S. Schabes-Retchkiman
    • 2
  • C. E. Lyman
    • 3
  1. 1.Air Products and Chemicals, Inc.AllentownUSA
  2. 2.Instituto de FisicaUniversidad Nacional Autonoma de MexicoMexico D.F.Mexico
  3. 3.Department of Materials Science and EngineeringLehigh UniversityBethlehemUSA

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