Protected Particle Collection from Gas Streams for Characterization by Analytical Electron Microscopy
Submicron particles are known to cause yield losses in the manufacture of electronic devices. Analytical electron microscopy (AEM) is a powerful tool for characterizing particles by size, morphology and composition. Data obtained can be used to identify particle sources. Major problems include particle collection and contamination control during sampling and transfer into the AEM. A controlled atmosphere specimen holder was used to collect particles from a gas stream, to isolate them from ambient contamination and to transfer them into the specimen chamber of the AEM. The collecting grid was examined in the AEM before particle collection to verify its cleanliness and provide background data. The grid retracts into an isolation chamber inside the specimen holder, thus protecting it from extraneous contamination during transfer to the AEM from the sampling site. The AEM combines a number of techniques to characterize particles by size, morphology, composition and crystal structure. Elemental analysis of individual particles and elemental images of high resolution are obtained by X-ray Emission Spectroscopy using the characteristic x-rays to identify specific elements. Examination of a large number of particles provides a histogram of the types of particles present.
KeywordsTitanium Dioxide Dust Filtration Molybdenum
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