Skip to main content

Particle Measurement in Gas System Components: Defining a Practical Test Method

  • Chapter
Particles in Gases and Liquids 2

Abstract

The objectives of this test program were to define a valid, practical test method to measure the cleanliness of process gas piping components and to illustrate the use of gas velocity as the basis for a cleanliness safety factor. Tests were conducted at three velocities using two particle counting methods, two valve designs, two cleaning methods, in both static and dynamic modes. A sufficient number of samples were tested to provide statistically valid results. The data show that high velocity flow tests are necessary to detect differences in high-purity cleaning methods and dynamic tests are required to evaluate valve designs. An industry standard test method for evaluation of systems and components is presented. Additional research is suggested to establish the critical velocity to remove particles of known size from a surface.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Subscribe and save

Springer+ Basic
$34.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or eBook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Similar content being viewed by others

References

  1. R.J. Miller, D.W. Cooper, H.S. Nagaraj, B.L. Owens, M.H. Peters, H.L. Wolfe, and J.J. Wu, Mechanisms of contaminant particle production, migration and adhesion, J. Vacuum Sci. Technol., 6(3). 2097–2102 (1988).

    Article  CAS  Google Scholar 

  2. D.A. Brandreth and R.E. Johnson, Removal of particulates from optical lenses, The Optical Index’s J. Ophthalmic Dispensing, 54(1). (1979).

    Google Scholar 

  3. A. Khilnani and D. Matsuhiro, Adhesion forces in particle removal from wafer surfaces, Microcontamination, 4(4). 28–30 (1986).

    Google Scholar 

  4. K.L. Mittal, editor, “Particles on Surfaces 1: Detection, Adhesion and Removal,” Plenum Press, New York (1988).

    Google Scholar 

  5. K.L. Mittal, editor, “Particles on Surfaces 2: Detection, Adhesion and Removal,” Plenum Press, New York (1989).

    Google Scholar 

  6. M. Corn, The adhesion of solid particles to solid surfaces. I.A review, J. Air Pollution Control Assoc, 11(11). 523–528 (1961).

    Article  CAS  Google Scholar 

  7. M. Corn, The adhesion of solid particles to solid surfaces, II., J. Air Pollution Control Assoc, 11(12). 566–584 (1961).

    Article  CAS  Google Scholar 

  8. J.A. Roberson and C.T. Crowe, “Engineering Fluid Mechanics”, Houghton Mifflin Company, Boston, 1980.

    Google Scholar 

  9. R.L. Panton, “Incompressible Flow”, pp. 29-450, 561-637, 761–763, John Wiley, New York, 1984.

    Google Scholar 

  10. “SEMI Specifications for Gases”, SEMI Designation C3-86, Semiconductor Equipment and Materials International, Mountain View, CA, 1987.

    Google Scholar 

  11. W.T. McDermott, A. Schwarz, and R.C. Ockovic, Particle deposition in pressurized gas sampling systems, Proceedings Institute of Environmental Sciences, pp. 392–399, Mount Prospect, IL, 1987.

    Google Scholar 

  12. C.E. Nowakowski and J.V. Martinez de Pinillos, In-situ monitoring of particles in gases, Proceedings Microcontamination Conference, pp. 160–176, Santa Clara, CA, 1985.

    Google Scholar 

  13. “NC-55: Ultra-Clean Production Specification”, Rev. B, Nov. 13, 1989, Nupro Company, Willoughby, Ohio 44094.

    Google Scholar 

  14. “NC-11: Special Cleaning and Packaging Specification”, Rev. L, Jan. 9, 1987, Nupro Company, Willoughby, Ohio 44094.

    Google Scholar 

  15. T. Govers, Ph D, G. Torelli, D. Gary and C. di Giulio, Department for Analysis and Equipment Development, L’Air Liquide, Claude-Delorme Research Center, Jouy-en-Josas, France.

    Google Scholar 

  16. D. Jensen, Senior Mechanical Engineer, ASM America, Inc., Phoenix, Arizona, and S. Goldsmith, Director of Engineering, IBR, Inc., Ann Arbor, Michigan.

    Google Scholar 

  17. “Standard Practice for Conducting an Interlaboratory Study to Determine The Precision of a Test Method”, ASTM Designation E691, ASTM, Philadelphia, 1987.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1990 Springer Science+Business Media New York

About this chapter

Cite this chapter

Koch, U.H., Kovach, M.C. (1990). Particle Measurement in Gas System Components: Defining a Practical Test Method. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_18

Download citation

  • DOI: https://doi.org/10.1007/978-1-4899-3544-1_18

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-3546-5

  • Online ISBN: 978-1-4899-3544-1

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics