Robots as a Potential Source of Particulate Contamination

  • K. May
  • T. Pfeifer
  • R. J. Schilling


The replacement of human clean room operators by robots provides an opportunity to reduce a major source of airborne particulate contamination. However, robotic manipulators also generate particulates, albeit at a reduced rate. The detrimental effects of robot-induced contamination on product yield will become increasingly important as the minimum feature size of integrated circuits continues to shrink. This paper reports the results of an investigation of the airborne submicron particulate contamination generated by an Intelledex 660 robotic arm. Particles generated by the joints of the manipulator under various operating modes are examined. In addition, a comparison of the particulate contamination generated by several custom end-effectors designed for handling integrated circuit photomasks is presented.


Particle Count Robotic Manipulator Clean Room Actuation Mechanism Background Particle 
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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • K. May
    • 1
  • T. Pfeifer
    • 1
  • R. J. Schilling
    • 1
  1. 1.Electrical and Computer Engineering DepartmentClarkson UniversityPotsdamUSA

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