Abstract
Recently many models have been presented to describe particle deposition in cleanroom environments. The models can be classified according to the scale of flow — cleanroom scale, equipment scale, or product scale. For the latter case, a detailed flow field is numerically generated or an idealized flow field is assumed. Particle deposition rates, in the presence of various external forces, are subsequently calculated by solving either the equation of convective diffusion or the particle equation of motion. A wide range of deposition mechanisms can be included: to account for actual operating conditions; and to assess the effectiveness of anti-contamination schemes.
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Turner, J.R. (1990). Modeling of Particle Deposition in Cleanroom Environments: Current Status. In: Mittal, K.L. (eds) Particles in Gases and Liquids 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-3544-1_1
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DOI: https://doi.org/10.1007/978-1-4899-3544-1_1
Publisher Name: Springer, Boston, MA
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