Nonconductive Specimens in the Electron Probe Microanalyzer—A Hitherto Poorly Discussed Problem

Abstract

Electron probe microanalysis and scanning electron microscopy of nonconducting specimens usually present the operator with problems. Many of these problems are related to the image quality: nonconducting specimens usually yield highly unstable images, often characterized by extremely bright areas at locations with the worst electrical conductivity and sudden shifts in the image with respect to the specimen from time to time. The bright areas in the image are the result of an excessive production of secondary electrons which in turn leads to a very poor resolution of surface details by the production of a halo.