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UV Excimer Laser Induced Photochemistry of Gaseous Organometallics for Surface Modification

  • M. Stuke
  • Y. Zhang
Part of the NATO ASI Series book series (NSSB, volume 198)

Abstract

Modification of surfaces is an essential part in many areas of modern technology, and often light is used for this purpose. A whole industry is living from the supply of chemicals for the control of the light intensity and the individual surface environment for surfaces of different sensitivity in different environments. Photography and lithography are two examples, where light is used for modification and patterning of surfaces.

Keywords

Excimer Laser Organometallic Compound Aluminum Hydride Carbon Incorporation Laser Etching 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • M. Stuke
    • 1
  • Y. Zhang
    • 1
  1. 1.Max-Planck-Institut für biophysikalische ChemieGöttingenF.R. Germany

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