UV Excimer Laser Induced Photochemistry of Gaseous Organometallics for Surface Modification
Modification of surfaces is an essential part in many areas of modern technology, and often light is used for this purpose. A whole industry is living from the supply of chemicals for the control of the light intensity and the individual surface environment for surfaces of different sensitivity in different environments. Photography and lithography are two examples, where light is used for modification and patterning of surfaces.
KeywordsExcimer Laser Organometallic Compound Aluminum Hydride Carbon Incorporation Laser Etching
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