Alternative Growth Techniques to Atmospheric Pressure MOCVD

Introduction and Conclusions
  • B. A. Joyce
Part of the NATO ASI Series book series (NSSB, volume 198)


The group set out to discuss three topics:-
  1. (i)

    What is presently known of surface and gas phase reactions involving Group V hydrides and Group III alkyls that is pertinent to low pressure growth.

  2. (ii)

    What techniques could be used to provide new and relevant information and to what extent are’ static’ techniques applicable to growth studies.

  3. (iii)

    What are the benefits of atomic layer epitaxy (ALE) in the low-pressure regime.



Atomic Layer Epitaxy Surface Population Group Versus Element Philips Research Laboratory Species Incident 
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Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • B. A. Joyce
    • 1
  1. 1.Philips Research LaboratoriesRedhill SurreyEngland

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