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Photochemical MOVPE Growth of Compound Semi-Conductors

Introduction and Conclusions
  • J. B. Mullin
  • S. J. C. Irvine
Part of the NATO ASI Series book series (NSSB, volume 198)

Abstract

Implicit in the discussions was the aim of photochemical processing for deposition of semi-conductors, dielectrics and metals. The interests of the group ranged from technological applications to basic scientific studies. Such a wide field of interest could clearly not be covered in depth in the limited time available, hence only critical aspects which seemed important to the members of the group could be discussed.

Keywords

Gallium Arsenide Cadmium Telluride Indium Phosphide Basic Scientific Study Precursor Supply 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • J. B. Mullin
    • 1
  • S. J. C. Irvine
    • 1
  1. 1.Royal Signals and Radar EstablishmentGreat Malvern, WorcsUK

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