Photochemical MOVPE Growth of Compound Semi-Conductors
Implicit in the discussions was the aim of photochemical processing for deposition of semi-conductors, dielectrics and metals. The interests of the group ranged from technological applications to basic scientific studies. Such a wide field of interest could clearly not be covered in depth in the limited time available, hence only critical aspects which seemed important to the members of the group could be discussed.
KeywordsGallium Arsenide Cadmium Telluride Indium Phosphide Basic Scientific Study Precursor Supply
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