The Chemistry of Silicon Deposition from Hydride Decomposition

  • B. A. Scott
  • S. M. Gates
  • C. M. Greenlief
  • R. D. Estes
Part of the NATO ASI Series book series (NSSB, volume 198)


Kinetic studies of Si CVD from SiH4 were carried out under conditions permitting separation of the process into its SiH4 and homogeneous (Si2H6, Si3H8 and higher hydride) reaction components. The reactivities of the individual species on atomically clean Si(111)−(7×7) surfaces were also measured. These experiments illustrate the information that must be obtained before attempting to model the overall CVD reaction.


Film Growth High Silane Silicon Deposition Silicon Hydride Chemisorption Reaction 
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Copyright information

© Springer Science+Business Media New York 1989

Authors and Affiliations

  • B. A. Scott
    • 1
  • S. M. Gates
    • 1
  • C. M. Greenlief
    • 1
  • R. D. Estes
    • 1
  1. 1.IBM Research DivisionThomas J. Watson Research CenterYorktown HeightsUSA

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