Statistical Aspects of Surface Particle Counting

  • B. Leslie
  • J. Pecen
  • K. Gross
  • A. Neukermans


A method is described which characterizes the statistical variations in detecting and sizing surface defects, such as particles on monitor wafers, using monodisperse spheres. This variability is related to the systematic and random errors involved in the measurement process. In addition, these parameters determine the statistics with which defects are counted and a general technique is described to predict the mean and variance in counting any defect population.


Capture Rate Poisson Noise Bare Silicon Binomial Statistic Monodisperse Sphere 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1991

Authors and Affiliations

  • B. Leslie
    • 1
  • J. Pecen
    • 1
  • K. Gross
    • 1
  • A. Neukermans
    • 1
  1. 1.Tencor InstrumentsMountain ViewUSA

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