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Statistical Aspects of Surface Particle Counting

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Particles on Surfaces 3

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Abstract

A method is described which characterizes the statistical variations in detecting and sizing surface defects, such as particles on monitor wafers, using monodisperse spheres. This variability is related to the systematic and random errors involved in the measurement process. In addition, these parameters determine the statistics with which defects are counted and a general technique is described to predict the mean and variance in counting any defect population.

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References

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Author information

Authors and Affiliations

  1. Tencor Instruments, 2400 Charleston Rd, Mountain View, CA., 94043, USA

    B. Leslie, J. Pecen, K. Gross & A. Neukermans

Authors
  1. B. Leslie
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  2. J. Pecen
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  3. K. Gross
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  4. A. Neukermans
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Editor information

Editors and Affiliations

  1. IBM US Technical Education, Thornwood, New York, USA

    K. L. Mittal

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© 1991 Springer Science+Business Media New York

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Leslie, B., Pecen, J., Gross, K., Neukermans, A. (1991). Statistical Aspects of Surface Particle Counting. In: Mittal, K.L. (eds) Particles on Surfaces 3. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-2367-7_7

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  • DOI: https://doi.org/10.1007/978-1-4899-2367-7_7

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-2369-1

  • Online ISBN: 978-1-4899-2367-7

  • eBook Packages: Springer Book Archive

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