The term microanalysis is used here to describe procedures that can provide in situ qualitative or quantitative chemical information about a specific part of the sample as distinct from more general chemical information about the whole of the sample. The essential feature is that, to varying degrees of spatial resolution, the procedures allow analysis of one or more chemical species—atoms, molecules, macromolecules—in relation to an identifiable feature of the sample ranging from subcellular compartments, inclusions or polymers, cells, or tissues.
KeywordsBulk Specimen Beam Damage Electron Dose Mass Thickness Hydrated Section
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