Electron-Probe Microanalysis

  • Eugene P. Bertin


Electron-probe microanalysis (EPMA), or electron microprobe analysis (EMA), is essentially (1) a nondestructive instrumental method of qualitative and quantitative analysis for chemical elements (2)—based on measurement of the wavelengths and intensities of their characteristic x-ray spectral lines (3)—excited by an electron beam having diameter of the order 0.1–1 μm. The method permits in-place determination of composition and spacial variation of composition on a microscopic scale.


Electron Beam Atomic Number Specimen Surface Display Screen Effective Atomic Number 
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Suggested Reading

  1. Adler, I., X-Ray Emission Spectrography in Geology, Elsevier, Amsterdam (1966); Chaps. 8–11, pp. 164–240.Google Scholar
  2. Andersen, C. A., ed., Microprobe Analysis, Wiley-Interscience, New York, 571 pp. (1973).Google Scholar
  3. Beaman, D. R., and J. A. Isasi, “Electron-Beam Microanalysis,” ASTM Special Technical Publication STP-506, American Society for Testing and Materials, Philadelphia, 80 pp. (1972).Google Scholar
  4. Bertin, E. P., Principles and Practice of X-Ray Spectrometric Analysis, 2nd ed., Plenum Press, New York (1975); Chap. 21, pp. 903–945.CrossRefGoogle Scholar
  5. Birks, L. S., Electron-Probe Microanalysis, 2nd ed., Wiley-Interscience, New York, 190 pp. (1971).Google Scholar
  6. Reed, S. J. B., Electron Microprobe Analysis, Cambridge University Press, Cambridge, 400 pp. (1975).Google Scholar
  7. Tousimis, A. J., and L. Marton, eds., Electron-Probe Microanalysis, Advances in Electronics and Electron Physics, Supplement 6, 450 pp. (1969).Google Scholar

Copyright information

© Springer Science+Business Media New York 1978

Authors and Affiliations

  • Eugene P. Bertin
    • 1
  1. 1.RCA LaboratoriesDavid Sarnoff Research CenterPrincetonUSA

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