Interface Design for Thin Film Adhesion

  • John E. E. Baglin

Abstract

Technological demands for good adhesion performance of thin coatings on critical surfaces arise in many applications. Examples include reflective coatings on optical components, chrome plating for corrosion protection, metallic contacts and conducting patterns on semiconductor chips and their packaging substrates, enamel glazing, low-friction coatings, and magnetic thin films for data storage applications.

Keywords

Nickel Furnace Hydrated Chrome Torque 

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References

  1. 1.
    M. D. Thouless, Mater. Res. Soc. Symp. Proc. 119, 51 (1988).CrossRefGoogle Scholar
  2. 2.
    J. E. E. Baglin, Ion beam effects on thin film adhesion, in: Ion Beam Modification of Insulators (P. Mazzoldi and G. W. Arnold, eds.), Chapter 15, Elsevier, Amsterdam (1987).Google Scholar
  3. 3.
    J. E. E. Baglin, Interface structure and thin film adhesion, in: Ion Beam Deposition, Film Modification and Synthesis (J. J. Cuomo, S. M. Rossnagel, and H. R. Kaufman, eds.), Noyes Publications, Park Ridge, NJ (1988).Google Scholar
  4. 4.
    L. E. Murr, Interfacial Phenomena in Metals and Alloys, Addison-Wesley, Reading, Mass. (1975).Google Scholar
  5. 5.
    A. M. Stoneham and P. W. Tasker, J. Phys. C. 18, L543 (1985).CrossRefGoogle Scholar
  6. 6.
    J. Ferrante and J. R. Smith, Phys. Rev. B31, 3427 (1985).Google Scholar
  7. 7.
    J. Ferrante, G. Bozzolo, C. W. Finley, and A. Banerjea, Mater. Res. Soc. Symp. Proc. 119, 3 (1988).CrossRefGoogle Scholar
  8. 8.
    L. Senbetu, J. G. Pronko, and T. T. Bardin, Mater. Res. Symp. Proc. 119, 75 (1988).CrossRefGoogle Scholar
  9. 9.
    J. E. E. Baglin, A. G. Schrott, R. D. Thompson, K. N. Tu, and A. Segmüller, Nucl. Instrum. Methods B19/20, 782 (1987).Google Scholar
  10. 10.
    E. Klokholm, IBM Internal Report No. RC9925, IBM—Research, Yorktown Heights, New York (April 1983).Google Scholar
  11. 11.
    J. J. Prescott, Applied Elasticity, p. 187, Dover, New York (1961).Google Scholar
  12. 12.
    G. I. Barenblatt, Adv. Appl. Mech. 7, 55 (1962).CrossRefGoogle Scholar
  13. 13.
    P. B. Madakson and J. E. E. Baglin, Mater. Res. Soc. Symp. Proc. 93, 41 (1987).CrossRefGoogle Scholar
  14. 14.
    P. Y. Hou and J. Stringer, Mater. Res. Soc. Symp. Proc. 119, 205 (1988).CrossRefGoogle Scholar
  15. 15.
    D.M. Mattox, in: Adhesion Measurement of Thin Films, Thick Films and Bulk Coatings (K. L. Mittal, ed.), NASTM Special Technical Publication 640, American Society for Testing and Materials, Philadelphia (1978).Google Scholar
  16. 16.
    J. E. E. Baglin and G. J. Clark, Nucl. Instrum. Methods B7/8, 881 (1985).Google Scholar
  17. 17.
    K. S. Kim, Elasto-Plastic Analysis of the Peel Test, University of Illinois Report No. UILU-ENG 85-6003 (March 1985); also J. Eng. Mater. Technol. 86-WA/EEP-3, 10 (1986) and Mater. Res. Soc. Symp. Proc. 119, 31 (1988).Google Scholar
  18. 18.
    J. Ahn, K. L. Mittal, and R. H. MacQueen, in Reference 15, p. 134.Google Scholar
  19. 19.
    J. W. Beams, J. Breazeale, and W. L. Bart, Phys. Rev. 100, 1657 (1955).CrossRefGoogle Scholar
  20. 20.
    S. Krongelb, in Reference 15, p. 107.Google Scholar
  21. 21.
    M. J. Matthewson, Appl. Phys. Lett. 49, 1426 (1986).CrossRefGoogle Scholar
  22. 22.
    J. A. Hinkley, J. Adhes. 16, 115 (1983).CrossRefGoogle Scholar
  23. 23.
    J. M. E. Harper, J. J. Cuomo, and H. R. Kaufman, J. Vac. Sci. Technol. 21, 737 (1982).CrossRefGoogle Scholar
  24. 24.
    L. E. Collins, J. G. Perkins, and P. T. Stroud, Thin Solid Films 4, 41 (1969).CrossRefGoogle Scholar
  25. 25.
    S. Jacobson, B. Jonsson, and B. Sundqvist, Thin Solid Films 107, 89 (1983).CrossRefGoogle Scholar
  26. 26.
    B. T. Werner, T. Vreeland, Jr., M. H. Mendenhall, Y. Qiu, and T. A. Tombrello, Thin Solid Films 104, 163 (1983).CrossRefGoogle Scholar
  27. 27.
    J. E. Griffith, Y. Qiu, and T. A. Tombrello, Nucl. Instrum. Methods 198, 607 (1982).CrossRefGoogle Scholar
  28. 28.
    J. E. E. Baglin, G. J. Clark, and J. Bøttiger, Mater. Res. Soc. Symp. Proc. 25, 179 (1984).CrossRefGoogle Scholar
  29. 29.
    J. Bøttiger, J. E. E. Baglin, V. Brusic, G. J. Clark, and D. Anfiteatro, Mater. Res. Soc. Symp. Proc. 25, 203 (1984).CrossRefGoogle Scholar
  30. 30.
    C. J. Sofield, C. J. Woods, C. Wild, J. C. Riviere, and L. S. Welch, Mater. Res. Soc. Symp. Proc. 25, 197 (1984).CrossRefGoogle Scholar
  31. 31.
    P. P. Pronko, A. W. McCormick, D. C. Ingram, A. K. Rai, J. A. Woolam, B. R. Appleton, and D. B. Poker, Mater. Res. Soc. Symp. Proc. 27, 559 (1984).CrossRefGoogle Scholar
  32. 32.
    J. E. E. Baglin, Mater. Res. Soc. Symp. Proc. 47, 3 (1985).CrossRefGoogle Scholar
  33. 33.
    G. Battaglin, M. Carbucicchio, R. Dal Maschio, F. Marchetti, P. Mazzoldi, and A. Valenti, XIV International Congress on Glass, New Delhi, India (March 1986).Google Scholar
  34. 34.
    G. Battaglin, P. Mazzoldi, and R. Dal Maschio, in: Induced Defects in Insulators (P. Mazzoldi, ed.), p. 235, Les Editions de Physique, Le Ulis Cedex (France) (1984).Google Scholar
  35. 35.
    M. Carbucicchio, A. Valenti, G. Battaglin, P. Mazzoldi, and R. Dal Maschio, Radiat. Eff. 98, 21 (1986).CrossRefGoogle Scholar
  36. 36.
    D. C. Ingram and P. P. Pronko, Nucl. Instrum. Methods B13, 462 (1986).Google Scholar
  37. 37.
    A. J. Kellock, J. Liesegang, G. L. Nyberg, and J. S. Williams, Mater. Res. Soc. Symp. Proc. 75, 179 (1987).CrossRefGoogle Scholar
  38. 38.
    C. J. Sofield and P. N. Trehan, Radiat. Eff. 98, 35 (1986).CrossRefGoogle Scholar
  39. 39.
    P. A. Ingemarsson and T. A. Tombrello, Mater. Res. Soc. Symp. Proc. 119, 103 (1988).CrossRefGoogle Scholar
  40. 40.
    P. A. Ingemarsson, T. Ericsson, A. Gustavsson-Seidel, G. Possnert, B. U. R. Sundqvist, and R. Wäppling, Proc. 12th International Conference of Hosei University on “Application of Ion Beams in Material Science,” Tokyo (September 1987).Google Scholar
  41. 41.
    T. T. Bardin, J. G. Pronko, and D. K. Kinell, Mater. Res. Soc. Symp. Proc. 77, 731 (1987).CrossRefGoogle Scholar
  42. 42.
    T. T. Bardin, J. G. Pronko, L. Senbetu, and D. A. Kozak, Mater. Res. Soc. Symp. Proc. 119, 147 (1988).CrossRefGoogle Scholar
  43. 43.
    R. G. Musket, I. M. Thomas, and J. G. Wilder, Appl. Phys. Lett. 52, 410 (1988).CrossRefGoogle Scholar
  44. 44.
    W. Ensinger, M. Barth, and G. K. Wolf, Nucl. Instrum. Methods B32, 104 (1988).Google Scholar
  45. 45.
    W. L. Johnson, Y. T. Cheng, M. Van Rossum, and M.-A. Nicolet, Nucl. Instrum. Methods B7/8, 657 (1985).Google Scholar
  46. 46.
    P. A. Ingemarsson, T. Ericsson, R. Wäppling and G. Possnert, J. Adhes. Sci. Technol. 3, 503 (1989).CrossRefGoogle Scholar
  47. 47.
    D. K. Sood, Royal Melbourne Institute of Technology (MRC), Melbourne, Australia, private communication.Google Scholar
  48. 48.
    R. Kelly, in: Physics and Chemistry of Solid Surfaces, Vol. 5 (R. Vanselow and R. Howe, eds.), Chapter 7, p. 159, Springer-Verlag, Heidelberg (1984).Google Scholar
  49. 49.
    P. Varga and E. Taglauer, J. Nucl. Mater. 111/112, 726 (1982).CrossRefGoogle Scholar
  50. 50.
    Chin-An Chang, J. E. E. Baglin, A. G. Schrott, and K. C. Lin, Appl. Phys. Lett. 51, 103 (1987).CrossRefGoogle Scholar
  51. 51.
    Ih-Houng Loh, J. K. Hirvonen, J. R. Martin, P. Revesz, and C. Boyd, Mater. Res. Soc. Symp. Proc. 108, 241 (1988).CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1991

Authors and Affiliations

  • John E. E. Baglin
    • 1
  1. 1.IBM Almaden Research CenterSan JoseUSA

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