Practical Considerations in Electron Beam Testing

  • T. J. Aton
Part of the Microdevices book series (MDPF)

Abstract

Electron beam testing has made the difficult transition from a laboratory idea to a technique that engineers are demanding for common use. It now enjoys success in both commercial equipment and many homemade systems. Despite successes, EBT remains a complicated technique with many variations and pitfalls. Many of the techniques that electron beam tester operators need to use their systems effectively are not well documented and must be rediscovered by each new user. This can be a time-consuming and frustrating process, especially for those asked to operate testers without a good fundamental understanding of how changes in operating conditions can affect measurements.

Keywords

Acetone Ozone Epoxy Hydrocarbon Rubber 

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    W. R. Blood Jr., in: MECL System Design Handbook, 4th ed., Motorola Semiconductor Products, Inc., chaps. 3, 4 (1988).Google Scholar
  2. 2.
    H. Schumacher and E. W. Strid, in: Measurement of High-Speed Signals in Solid State Devices, vol. 28 (R. B. Marcus, ed.), Academic, San Diego, pp. 41–83 (1990).CrossRefGoogle Scholar
  3. 3.
    S. Concina and N. Richardson, Microelectron. Eng.7, 339 (1987).CrossRefGoogle Scholar
  4. 4.
    D. F. Spicer and J. N. Sackett, J. Vac. Sci. Technol. B 4, 213 (1986).CrossRefGoogle Scholar
  5. 5.
    K. Ookubo, Y. Goto, Y. Furukawa, and T. Inagaki, in: Electron Microscopy 1986, vol. 1 (T. Imura, S. Maruse, and T. Suzuki, eds.), Jap. Soc. Electron Microsc, Tokyo, pp. 631–32 (1986).Google Scholar
  6. 6.
    E. Menzel and M. Brunner, in: Scanning Electron Microscopy 1983/I, SEM, Inc., AMF O’Hare, IL, pp. 65–75 (1983).Google Scholar

Copyright information

© Springer Science+Business Media New York 1993

Authors and Affiliations

  • T. J. Aton
    • 1
  1. 1.Texas Instruments Inc.DallasUSA

Personalised recommendations