Abstract
Electron beam testing has made the difficult transition from a laboratory idea to a technique that engineers are demanding for common use. It now enjoys success in both commercial equipment and many homemade systems. Despite successes, EBT remains a complicated technique with many variations and pitfalls. Many of the techniques that electron beam tester operators need to use their systems effectively are not well documented and must be rediscovered by each new user. This can be a time-consuming and frustrating process, especially for those asked to operate testers without a good fundamental understanding of how changes in operating conditions can affect measurements.
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© 1993 Springer Science+Business Media New York
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Aton, T.J. (1993). Practical Considerations in Electron Beam Testing. In: Thong, J.T.L. (eds) Electron Beam Testing Technology. Microdevices. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1522-1_11
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DOI: https://doi.org/10.1007/978-1-4899-1522-1_11
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4899-1524-5
Online ISBN: 978-1-4899-1522-1
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