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Thermal Discharges: Experiments and Diagnostics

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Book cover Microwave Discharges

Part of the book series: NATO ASI Series ((NSSB,volume 302))

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Abstract

In plasma processing commonly a distinction is made between low pressure (or low (ion) temperature) plasmas and thermal plasmas1. The transition between these two classes is gradual. Plasmas cover a wide spectrum in electron density (1015/m3–1023/m3) and ionization degree (10−7–1). In low pressure plasmas2 as RF—discharges the ionization degree is usually small and these plasmas are characterized by an abundance of molecular fragments and large ambipolar fields. The high electron density thermal plasmas have a high ionization degree and nearly full dissociation and a high heavy particle temperature. In this paper we will focuss on these plasmas.

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Authors and Affiliations

  1. Department of Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands

    D. C. Schram, D. A. Benoy, J. J. Beulens, A. J. M. Buuron, F. H. A. G. Fey, M. J. de Graaf, G. J. Meeusen, R. F. G. Meulenbroeks, J. A. M. van der Mullen, J. M. de Regt, M. C. M. van de Sanden & Z. Qing

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  1. D. C. Schram
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  4. A. J. M. Buuron
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  5. F. H. A. G. Fey
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  6. M. J. de Graaf
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  8. R. F. G. Meulenbroeks
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  9. J. A. M. van der Mullen
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Editors and Affiliations

  1. Instituto Superior Técnico, Centro de Electrodinâmica da Universidade Técnica de Lisboa, Lisbon, Portugal

    Carlos M. Ferreira

  2. Groupe de physique des plasmas, Université de Montréal, Montréal, Québec, Canada

    Michel Moisan

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© 1993 Springer Science+Business Media New York

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Schram, D.C. et al. (1993). Thermal Discharges: Experiments and Diagnostics. In: Ferreira, C.M., Moisan, M. (eds) Microwave Discharges. NATO ASI Series, vol 302. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1130-8_16

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  • DOI: https://doi.org/10.1007/978-1-4899-1130-8_16

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-1132-2

  • Online ISBN: 978-1-4899-1130-8

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