Abstract
Two types of polymer-metal interfaces of interest to microelectronics have been considered.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
A. Torrisi, G. Marletta, O. Puglisi and S. Pignataro, Surface Interface Anal., 5, 161 (1983).
S. Pignataro, A. Torrisi and G. Ferla, Surface Interface Anal., 7 129 (1985).
A. Torrisi and S. Pignataro, Surface Interface Anal., 9, 441 (1986).
A. Torrisi, A. Cavallaro, A. Perniciaro, G. Ferla and S. Pignataro, Mater. Res. Soc. Symp. Proc, 108, 365 (1988).
J. Pospisil in “Advances in Polymer Science”, K. Dusek editor, vol.36, p.69, Springer Verlag, Berlin, 1980.
Y.-H. Kim, J. Kim, G.F. Walker, C. Feger and S.P. Kowalczyk, J. Adhesion Sci. Technol., 2, 95 (1988).
M. Garilli, G. Marletta, O. Puglisi, C. Oliveri, C. Magro and G. Ferla, Mater. Res. Soc. Symp. Proc, 153, 273 (1989).
F.Iacona, M.Garilli, G.Marletta, O.Puglisi and S.Pignataro, submitted to J. Mater. Res.
see for example LJ. Atanasoska, S.G. Anderson, H.M. Meyer III, Z. Lin and J.H. Weaver, J. Vac. Sci. Technol. A5, 3325 (1987) and references therein.
see for example P.S. Ho, P.O. Hahn, J.W. Bartha, G.W. Rubloff, F.K. LeGoues and B.D. Silverman, J. Vac. Sci. Technol. A3, 739 (1985) and references therein.
see for example W.C. Stewart, J. Leu and K.F. Jensen, Mater. Res. Soc. Symp. Proc., 153, 285 (1989) and references therein.
see for example K. Kelley, Y. Ishino and H. Ishida, Thin Solid Films, 154, 271 (1987) and references therein.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1991 Springer Science+Business Media New York
About this chapter
Cite this chapter
Pignataro, S. (1991). Chemical Interactions at Polymer-Metal Interfaces of Interest to Microelectronics. In: Mittal, K.L. (eds) Metallized Plastics 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-0735-6_14
Download citation
DOI: https://doi.org/10.1007/978-1-4899-0735-6_14
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4899-0737-0
Online ISBN: 978-1-4899-0735-6
eBook Packages: Springer Book Archive