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Surface Studies of Chemically Vapour Deposited Silicon Films Using Scanning Force Microscopy

  • C. Flueraru
  • C. Cobianu
  • P. Cosmin
  • D. Dascalu
Part of the NATO ASI Series book series (NSSB, volume 360)

Abstract

A new method for surface diffusion characterization is presented. The measurements conditions for roughness were analysed and the importance of the applied force was proven. The quantitative measurements of friction force versus applied force are presented. The connection between the average friction coefficient and the roughness surface was experimentally demonstrated.

Keywords

Friction Coefficient Friction Force Applied Force Deposition Temperature Roughness Surface 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1997

Authors and Affiliations

  • C. Flueraru
    • 1
  • C. Cobianu
    • 1
  • P. Cosmin
    • 1
  • D. Dascalu
    • 1
  1. 1.Institute of MicrotechnologyBucharestRomania

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