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The Effect on Yield of Clustering and Radial Variations in Defect Density

  • A. V. Ferris-Prabhu
  • M. A. Retersdorf

Abstract

This work examines the effect on yield, of the clustering and radial variation of fatal defects. An expression is developed for fatal defects as a function of chip area and distance of the chip from the edge of the wafer, and used to estimate the yield of successively larger numbers of array segments of a bipolar SRAM.

Keywords

Integrate Circuit Defect Density Poisson Model Radial Variation Chip Area 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1990

Authors and Affiliations

  • A. V. Ferris-Prabhu
    • 1
  • M. A. Retersdorf
    • 1
  1. 1.IBM General Technology DivisionIBMEssex JunctionUSA

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