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Secondary Ion Mass Spectrometry

  • Chapter
Catalyst Characterization

Part of the book series: Fundamental and Applied Catalysis ((FACA))

Abstract

When a solid target is bombarded by ions having energies of several keV, different complex processes may occur simultaneously. When the ion energy is low (typically less than 2 keV), the target surface can scatter the incident ions by an elastic collision mechanism. Analysis of the energetics of this collision is called ion scattering spectroscopy ISS, which is reviewed in Chapter 12. In addition to this elastic collision, in particular for higher ion energies, a certain depth of the solid is perturbed and excited, which results in emission of secondary electrons and photons and sputtering of neutral or charged fragments. Some of the incident ions may also be trapped or implanted in the solid. The mass analysis of these charged fragments (i.e., negatively or positively charged ions) is called secondary ion mass spectrometry (SIMS). Ions of chemically inert gases are generally used in SIMS as primary exciting particles but, sometimes, for given purposes, more reactive ions such as O2 + or Cs+ are also employed.

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Authors and Affiliations

  1. Laboratoire de Catalyse Hétérogène et Homogène, URA CNRS, Université des Sciences et Technologies de Lille, Villeneuve D’Ascq, France

    J. Grimblot

  2. Institut de Recherches sur la Catalyse, CNRS, Villeurbanne, France

    M. Abon

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  1. J. Grimblot
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  2. M. Abon
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Editors and Affiliations

  1. Late of Institut de Recherches sur la Catalyse, CNRS, Villeurbanne, France

    Boris Imelik  & Jacques C. Vedrine  & 

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Grimblot, J., Abon, M. (1994). Secondary Ion Mass Spectrometry. In: Imelik, B., Vedrine, J.C. (eds) Catalyst Characterization. Fundamental and Applied Catalysis. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9589-9_11

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  • DOI: https://doi.org/10.1007/978-1-4757-9589-9_11

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