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The Scanning Probe Microscope as a Metrology Tool

  • Rebecca S. Howland

Abstract

Linearity of the piezoelectric scanner is critical to using the scanning probe microscope as a metrology tool. In this paper, the inherent nonlinearities associated with piezoelectric materials and scanners synthesized from them are described both macroscopically and microscopically. Various corrections to the nonlinearities are presented and compared.

Keywords

Piezoelectric Material Scanning Probe Microscope Cross Coupling Measurement Grid Software Correction 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    J.E. Griffith, D.A. Grigg, M.J. Vasile, P.E. Russell, E.A. Figeral, Characterization of scanning probe microscope tips for linewidth measurement. J. Vac. Sci. Technol. B 9 (6): 3586–3589 (1991).CrossRefGoogle Scholar
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    R.C. Barrett, and C.F. Quate, Optical scan-correction system applied to atomic force microscopy, Rev. Sci. Instrum. 62 (6): 1393 (1991).CrossRefGoogle Scholar
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    J.E. Griffith, G.L. Miller, and C.A. Green, A scanning tunneling microscope with a capacitance-based position monitor,“ J.Vac. Sci. Technol. B 8 (6): 2023–2027 (1990).CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1994

Authors and Affiliations

  • Rebecca S. Howland
    • 1
    • 2
  1. 1.Park Scientific InstrumentsSunnyvaleUSA
  2. 2.Tencor InstrumentsMountain ViewUSA

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