Abstract
Linearity of the piezoelectric scanner is critical to using the scanning probe microscope as a metrology tool. In this paper, the inherent nonlinearities associated with piezoelectric materials and scanners synthesized from them are described both macroscopically and microscopically. Various corrections to the nonlinearities are presented and compared.
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© 1994 Springer Science+Business Media New York
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Howland, R.S. (1994). The Scanning Probe Microscope as a Metrology Tool. In: Cohen, S.H., Bray, M.T., Lightbody, M.L. (eds) Atomic Force Microscopy/Scanning Tunneling Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-9322-2_35
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DOI: https://doi.org/10.1007/978-1-4757-9322-2_35
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-9324-6
Online ISBN: 978-1-4757-9322-2
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