Linearity and Calibration of Scanning Probe Microscope Images
Scanning probe microscopes rely on piezoelectric ceramics for scanning a probe across a sample surface. Artifacts in SPM images are a result of the nonlinearity, hysteresis, and creep in piezoelectric ceramics. Examples of the artifacts in SPM images created by piezoelectric scanners and methods for correcting these artifacts are presented.
KeywordsScanning Probe Microscope Piezoelectric Ceramic Profiler Standard Probe Geometry Scanning Probe Microscope Image
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