A Silica Based Integrated Optic Microwave Power Sensor
Microwave heating is becoming common in areas such as heating of food, sintering of ceramics, etc. [1–3]. Hence, the measurement of microwave power in microwave applicators (cavities) is becoming increasingly important. The most attractive feature of optical power sensors is that their construction is from dielectric materials, where as other sensing elements are either metal or semiconductor [4–5]. Several optical microwave power sensors have been developed [6–7], as well as electrical sensors which require wire conductors to carry the signal. We describe a novel optical microwave power sensor having an active sensing area of only 200 μm by 2 mm. The device employs a Mach-Zehnder interferometer which is created using multimode interference couplers. Since the sensor contains no metallic components and since the susceptor can be made to have a very small area, the spatial resolution is high.
KeywordsMicrowave Power Microwave Field Beam Propagation Method IEEE Photonic Technology Letter Input Waveguide
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