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Semiconductor Integrated Photonic Transducer Chip for High-Resolution Displacement Measurement

  • Hans P. Zappe
  • Daniel Hofstetter

Abstract

Optical displacement measurement using interferometric techniques is a well established and technologically advanced discipline. Two of the limitations which may be encountered in applying an optical approach to high-resolution determination of distances or movements, however, are optical system size and robustness. The use of semiconductor integrated optics for optical interferometry can circumvent these restrictions: photonic integrated circuits1 (PICs) are typically quite small and monolithic integration of the various components can result in a microsystem of considerable physical ruggedness.

Keywords

Michelson Interferometer Paul Scherrer Institute Side Mode Suppression Ratio Grin Lens Environmental Refractive Index 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    Koch, T.L. and Koren, U., “Semiconductor photonic integrated circuits”, IEEE Journal of Quantum Electronics, 27(3), 1991, p. 641CrossRefGoogle Scholar
  2. 2.
    Zappe, H.P., Arnot, H.E.G., and Kunz, R.E., “Technology for III-V-based integrated optical sensors”, Sensors and Materials, 6, 1994, p. 261Google Scholar
  3. 3.
    Hofstetter, D., Zappe, H.P. and Dändliker, R., “A monolithically integrated optical displacement sensor in GaAs/AlGaAs”, Electronics Letters, 31(24), 27 November 1995, p. 2121CrossRefGoogle Scholar
  4. 4.
    Hofstetter, D., Zappe, H.P. and Dändliker, R., “A monolithically integrated double Michelson interferometer for optical displacement measurement with direction determination”, IEEE Photonics Technology Letters, 8, October 1996Google Scholar
  5. 5.
    Suhara, T., Taniguchi, T., Uemakai, M., Nishihara, H., Hirata, T. and Suehiro, M., “Monolithic integrated-optic position/displacement sensor using waveguide gratings and QW-DFB laser”, IEEE Photonics Technology Letters, 7, 1995, p. 1195CrossRefGoogle Scholar
  6. 6.
    Maisenhölder, B., Zappe, H.P., Kunz, R.E., Riel, P., Moser M. and Edlinger, J., “GaAs/AlGaAs refractometer platform for bio-/chemo-optical sensing applications”, Sensors and Actuators, 1996Google Scholar

Copyright information

© Springer Science+Business Media New York 1997

Authors and Affiliations

  • Hans P. Zappe
    • 1
  • Daniel Hofstetter
    • 1
  1. 1.Paul Scherrer InstituteZurichSwitzerland

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