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Analysis and Fabrication of 45° Self-Aligned Integrated Mirrors on Dielectric Optical Waveguides

  • L. Joannes
  • B. Grimbert
  • J. Harari
  • J. P. Vilcot
  • W. Tchana
  • D. Decoster

Abstract

Integrated corner mirrors are of great interest in integrated optics since they can reduce the distance in which changes of propagation direction of light is done. A corner mirror consists of an etched vertical facet producing total internal reflection and abrupt change of the propagation direction.

Keywords

Optical Waveguide Reflection Loss Beam Propagation Method Intrinsic Loss Minimal Reflection Loss 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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    P. Buchmann. and H. Kaufmann, GaAs single mode rib waveguide with reactive ion-etched totally reflecting corner mirrors, Journ. Light. Tech., 3:785 (1985).CrossRefGoogle Scholar
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    P. Albrecht, W. Döldissen, U. Niggebriigge, H.P. Nolthing, and H. Schmid, Self-aligned mirrors for optical integration on InGaAsP/InP, Proc. ECOC, 242 (1987).Google Scholar
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    E. Gini, G. Guekos and H. Melchior, Low loss corner mirrors with 45° deflection angle for integrated optics, Elect. Lett., 28:499 (1992).CrossRefGoogle Scholar
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    L. Joannes, J. Harari, J.P. Vilcot and D. Decoster, Analysis of intrinsic losses of 45° self-aligned integrated mirror using finite-difference beam propagation method, Proc. SPIE 2212 (1994) to be published.Google Scholar
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    Y. Chung and N. Dagli., Analysis of integrated optical corner reflectors using a finite difference beam propagation method , IEEF. Photon. Tech. Lett., 3:150 (1991).CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1995

Authors and Affiliations

  • L. Joannes
    • 1
  • B. Grimbert
    • 1
  • J. Harari
    • 1
  • J. P. Vilcot
    • 1
  • W. Tchana
    • 1
  • D. Decoster
    • 1
  1. 1.Institut d’Electronique et de Microélectronique du Nord UMR - CNRS 9929 - Dépt Hyperfréquences et SemiconducteursDomaine Universitaire Scientifique de Villeneuve d’AscqVilleneuve d’Ascq CedexFrance

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