Investigating Micromachined Thermal Emitters for Infrared Applications

  • Larrie S. Carr
  • Marek J. Syrzycki


The creation of sub-millimeter sized thermal spots and the generation of continuously changing two-dimensional thermal scenes using thermal spots are essential in calibrating complex infrared optical systems used in research, medicine and military applications. Hence, there is a need for fabricating arrays of miniature heater elements, featuring a large controllable range of infrared radiation and small crosstalk between array elements.


Power Dissipation Thermal Emitter Sacrificial Layer Heater Dissipation Thermal Time Constant 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1995

Authors and Affiliations

  • Larrie S. Carr
    • 1
  • Marek J. Syrzycki
    • 1
  1. 1.School of Engineering ScienceSimon Fraser UniversityBurnabyCanada

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