Investigating Micromachined Thermal Emitters for Infrared Applications
The creation of sub-millimeter sized thermal spots and the generation of continuously changing two-dimensional thermal scenes using thermal spots are essential in calibrating complex infrared optical systems used in research, medicine and military applications. Hence, there is a need for fabricating arrays of miniature heater elements, featuring a large controllable range of infrared radiation and small crosstalk between array elements.
KeywordsPower Dissipation Thermal Emitter Sacrificial Layer Heater Dissipation Thermal Time Constant
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