A Debrisless Laser-Plasma Source for EUV and XUV Generation
Interest in debris-free sources of short-wavelength EUV radiation has risen in recent years due primarily to anticipated needs in the area of projection lithography, where smaller feature sizes and increased production rates are targeted for the near-future in the semiconductor industry. Consequently, laser-plasmas have come to the forefront as attractive source candidates for such lithography systems. As compact, modular, and highrep-rate sources, laser-plasmas have already demonstrated the required minimum efficiency[1,2]. The water-droplet laser-plasma source offers the additional advantages of low-cost (~$10−6/shot), continuous, debris-free operation that future lithography systems require. Broadband emission from solid-target laser-plasmas created from high-Z materials, which can lead to off-band heating by absorption of the primary collection optics, is another problem that is circumvented with the narrow-band droplet laser-plasma. In addition, solute-doped droplet targets are promising candidates for generating debris-free XUV radiation having, in general, the same advantages as the water droplet EUV source.
KeywordsWater Droplet Lithography System Small Feature Size Projection Lithography Droplet System
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