YBCO Deposition by Thermal Evaporation
High quality YBCO films can be grown by reactive thermal coevaporation of Y, Ba and Cu. Single and double sided YBCO thin films are deposited on single crystal wafers up to 8" diameter by rotation of the substrates above a fixed oxygen pocket. Films fabricated on IBAD buffered polycrystalline YSZ substrates show superconducting properties comparable to single crystal substrates.
A modified setup is presented which allows to grow YBCO on 20×20 cm2 deposition area on fixed substrates in a continuous process. The metal fluxes are individually controlled by atomic absorption spectroscopy while the evaporation boats are refillable in-situ. First results show that the superconducting properties of films fabricated with this system are comparable to YBCO grown with the rotating substrate scheme.
KeywordsSapphire Substrate Atomic Absorption Spectroscopy Superconducting Property Deposition Area YBCO Film
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