Miniature Resistance Thermometers Based on Ge Films on GaAs
Several types of miniature resistance thermometers based on Ge films have been developed and fabricated. They can operate in the 0.5 to 300, 77 to 400 and 200 to 500 K temperature ranges. The behavior of cryogenic thermometers has been investigated at low temperatures (1.7, 4.2 and 77.4 K) and in magnetic fields up to 14 T.
KeywordsHigh Magnetic Field GaAs Substrate Sensitive Element Thermal Sensitivity Impurity Diffusion Coefficient
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