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Computer-Aided Imaging and Interpretation

  • Dale E. Newbury
  • David C. Joy
  • Patrick Echlin
  • Charles E. Fiori
  • Joseph I. Goldstein

Abstract

This chapter is concerned with the acquisition, display, and interpretation of the various images which can be obtained with the SEM—e.g., secondary electron, backscattered electron, x-ray—and how the modern digital computer can be applied in the process. We will be concerned with all aspects of SEM imaging from the generation of the signal when the electron beam interacts with the specimen surface to the perception and interpretation of this information in the mind of the observer. Indeed, we will view all steps involved as an information channel which has certain imperfections and nonlinearities which must be examined in the context of an SEM application.

Keywords

Gray Level Display System Array Processor Photographic Film Average Atomic Number 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 1986

Authors and Affiliations

  • Dale E. Newbury
    • 1
  • David C. Joy
    • 2
  • Patrick Echlin
    • 3
  • Charles E. Fiori
    • 4
  • Joseph I. Goldstein
    • 5
  1. 1.National Bureau of StandardsGaithersburgUSA
  2. 2.AT & T Bell LaboratoriesMurray HillUSA
  3. 3.University of CambridgeCambridgeEngland
  4. 4.National Institutes of HealthBethesdaUSA
  5. 5.Lehigh UniversityBethlehemUSA

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