Tunable Optical Filter and IR Gas Spectroscopy
Large, flat, flip-up optical interference filters of porous Si were fabricated with areas ranging from 250 by 750 µm2 to 2400 by 4000 µm2 and a typical thickness of 30 µm. Fig. 8.1 shows the first design with a ribbon actuator (compare Fig. 7.13 A). In the rest position, the plate is lifted about 45° out of plane. This angle can be increased with a longer actuator. Experiments with different thicknesses of the porous Si layer show that the plate begins to warp when it is thinner than 15 µm and is difficult to lift up when it is thicker than 40 µm, because the actuator gets also thicker and more rigid.
KeywordsPrint Circuit Board Filter Plate Tunable Filter Bragg Mirror Tunable Optical Filter
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