Abstract
The two-dimensional microscanner contains an asymmetry in the beam to induce a perpendicular motion. The bimorph beam has an “L”-shape (Fig. 5.1 a). The electrical path is incorporated on one beam. The high sensitivity of the thermal bimorph actuator allows a slow (non-resonant) movement of the scanner in one direction. This movement is mainly created by the large deflection of the long part of the beam and the scanner rotates around the y-axis (Fig. 5.1 b). This movement will be called frame scanning at low frequency. The second orthogonal scanning direction is a resonance motion due to the movement of the short beam. In this mode, the scanner twists around the x-axis and this movement provides raster scanning at high frequency [162, 116].
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© 2002 Springer Science+Business Media New York
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Lammel, G., Schweizer, S., Renaud, P. (2002). Two-Dimensional Microscanner. In: Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators. Microsystems, vol 14. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-6083-5_5
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DOI: https://doi.org/10.1007/978-1-4757-6083-5_5
Publisher Name: Springer, Boston, MA
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