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Two-Dimensional Microscanner

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud
Part of the Microsystems book series (MICT, volume 14)

Abstract

The two-dimensional microscanner contains an asymmetry in the beam to induce a perpendicular motion. The bimorph beam has an “L”-shape (Fig. 5.1 a). The electrical path is incorporated on one beam. The high sensitivity of the thermal bimorph actuator allows a slow (non-resonant) movement of the scanner in one direction. This movement is mainly created by the large deflection of the long part of the beam and the scanner rotates around the y-axis (Fig. 5.1 b). This movement will be called frame scanning at low frequency. The second orthogonal scanning direction is a resonance motion due to the movement of the short beam. In this mode, the scanner twists around the x-axis and this movement provides raster scanning at high frequency [162, 116].

Keywords

Modulation Transfer Function Initial Curvature Driving Frequency Short Beam Raster Scanning 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2002

Authors and Affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

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