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One-Dimensional Microscanner

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud
Part of the Microsystems book series (MICT, volume 14)

Abstract

This chapter describes quantitatively the actuation of the optical scanner as well as of the tunable optical filter, the latter will be described more in detail in chapter 6 – 8. The fabrication technology of both devices is different, but the physics behind it is the same.

Keywords

Resonance Frequency Deflection Angle Beam Length Position Sensitive Detector Dynamic Characterization 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2002

Authors and Affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

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