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Basics for a Thermally Actuated Micromirror

  • Gerhard Lammel
  • Sandra Schweizer
  • Philippe Renaud
Part of the Microsystems book series (MICT, volume 14)

Abstract

The following microactuator principle will be used for various applications: a miniature scanning device for barcode reading, a microprojector and a tunable filter in a microspectrometer. The specifications are similar.

Keywords

Residual Stress Free Convection Beam Length Convection Coefficient Optical Angle 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2002

Authors and Affiliations

  • Gerhard Lammel
    • 1
  • Sandra Schweizer
    • 1
  • Philippe Renaud
    • 1
  1. 1.Swiss Federal Institute of Technology LausanneEPFLSwitzerland

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