In this book, we explore the application of MEMS technologies in micro-optical devices that use integrated micro-actuators for scanning mirrors and optical interference plates. These devices, as part of the so-called MOEMS (Micro Opto Electro Mechanical Systems) family, are primarily intended to be used as key components for linear and two-dimensional light beam scanning as well as for tunable optical filters.
KeywordsDeflection Angle Light Modulator Texas Instrument Fraunhofer Institute Magnetic Actuation
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